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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Engelmann, Hans-Jürgen


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  <dc:contributor>von Borany, Johannes</dc:contributor>
  <dc:creator>Engelmann, Hans-Jürgen</dc:creator>
  <dc:date>2021-02-09</dc:date>
  <dc:description>Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars</dc:description>
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  <dc:title>Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration:  Figs. 1a, 1b and 5</dc:title>
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