Figure Open Access
Engelmann, Hans-Jürgen
@misc{engelmann_hans_jurgen_2021_807, author = {Engelmann, Hans-Jürgen}, title = {{Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5}}, month = feb, year = 2021, doi = {10.14278/rodare.807}, url = {https://doi.org/10.14278/rodare.807} }
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