Figure Open Access

Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Engelmann, Hans-Jürgen

Project leader(s)
von Borany, Johannes

Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars

Files (3.4 MB)
Name Size
Fig. 1a.tif
md5:967c1e01ce093cc8313f10c51a4f44f6 		946.7 kB Download
Fig. 1b.tif
md5:0f0ea00593998e0128970acd63a1b4eb 		994.1 kB Download
Fig. 5.tif
md5:161249b8ed1f0b7f34c02a641f47e0c1 		1.4 MB Download
761
131
views
downloads
All versions This version
Views 761761
Downloads 131131
Data volume 146.1 MB146.1 MB
Unique views 604604
Unique downloads 100100
More info on how stats are collected.
Publication date:
February 9, 2021
DOI:
10.14278/rodare.807

RODARE DOI Badge

DOI 

10.14278/rodare.807

Markdown 

[![DOI](https://rodare.hzdr.de/badge/DOI/10.14278/rodare.807.svg)](https://doi.org/10.14278/rodare.807)

reStructedText 

.. image:: https://rodare.hzdr.de/badge/DOI/10.14278/rodare.807.svg
   :target: https://doi.org/10.14278/rodare.807

HTML 

<a href="https://doi.org/10.14278/rodare.807"><img src="https://rodare.hzdr.de/badge/DOI/10.14278/rodare.807.svg" alt="DOI"></a>

Image URL 

https://rodare.hzdr.de/badge/DOI/10.14278/rodare.807.svg

Target URL 

https://doi.org/10.14278/rodare.807

Grants:
European Commission:
  • IONS4SET - Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology (688072)
Related identifiers:
Cites:
10.17815/jlsrf-3-159
Identical to:
https://www.hzdr.de/publications/Publ-32276
Referenced by:
10.1016/j.mne.2020.100074, https://www.hzdr.de/publications/Publ-32129
Communities:
License (for files):
Creative Commons Attribution 4.0 International

Versions

Version 1 10.14278/rodare.807 Feb 9, 2021
Cite all versions? You can cite all versions by using the DOI 10.14278/rodare.806. This DOI represents all versions, and will always resolve to the latest one. Read more.

Share

Cite as

Export