Figure Open Access

Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Engelmann, Hans-Jürgen

Project leader(s)
von Borany, Johannes

Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars

Files (3.4 MB)
Name Size
Fig. 1a.tif
md5:967c1e01ce093cc8313f10c51a4f44f6
946.7 kB Download
Fig. 1b.tif
md5:0f0ea00593998e0128970acd63a1b4eb
994.1 kB Download
Fig. 5.tif
md5:161249b8ed1f0b7f34c02a641f47e0c1
1.4 MB Download
23
2
views
downloads
All versions This version
Views 2323
Downloads 22
Data volume 1.9 MB1.9 MB
Unique views 1717
Unique downloads 22

Share

Cite as