Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Publication date:

February 9, 2021

DOI:

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DOI

10.14278/rodare.807

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Target URL

https://doi.org/10.14278/rodare.807

Grants:

European Commission:

• IONS4SET - Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology (688072)

Related identifiers:

Cites:
10.17815/jlsrf-3-159

Identical to:
https://www.hzdr.de/publications/Publ-32276

Referenced by:
10.1016/j.mne.2020.100074, https://www.hzdr.de/publications/Publ-32129

Communities:

• OpenAIRE
• Institute of Ion Beam Physics and Materials Research
• Ion Beam Center
• Research field: Matter
• RODARE

License (for files):

Creative Commons Attribution 4.0 International

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