Figure Open Access
Engelmann, Hans-Jürgen
{ "id": "807", "issued": { "date-parts": [ [ 2021, 2, 9 ] ] }, "DOI": "10.14278/rodare.807", "abstract": "<p>Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars</p>", "publisher": "Rodare", "title": "Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5", "author": [ { "family": "Engelmann, Hans-J\u00fcrgen" } ], "type": "figure" }
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