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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Engelmann, Hans-Jürgen


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{
  "id": "807", 
  "DOI": "10.14278/rodare.807", 
  "abstract": "<p>Energy-filtered transmission electron microscopy (EFTEM) images of stacked&nbsp;Si/SiO2/Si nanopillars</p>", 
  "author": [
    {
      "family": "Engelmann, Hans-J\u00fcrgen"
    }
  ], 
  "issued": {
    "date-parts": [
      [
        2021, 
        2, 
        9
      ]
    ]
  }, 
  "publisher": "Rodare", 
  "type": "figure", 
  "title": "Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration:  Figs. 1a, 1b and 5"
}
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