Figure Open Access
Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5
Engelmann, Hans-Jürgen
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{
"@type": "ImageObject",
"description": "<p>Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars</p>",
"citation": [
{
"@type": "CreativeWork",
"@id": "https://doi.org/10.17815/jlsrf-3-159"
}
],
"@context": "https://schema.org/",
"@id": "https://doi.org/10.14278/rodare.807",
"license": "https://creativecommons.org/licenses/by/4.0/legalcode",
"url": "https://rodare.hzdr.de/record/807",
"identifier": "https://doi.org/10.14278/rodare.807",
"name": "Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5",
"contributor": [
{
"@type": "Person",
"name": "von Borany, Johannes",
"affiliation": "HZDR"
}
],
"sameAs": [
"https://www.hzdr.de/publications/Publ-32276"
],
"creator": [
{
"@type": "Person",
"name": "Engelmann, Hans-J\u00fcrgen",
"affiliation": "HZDR"
}
],
"datePublished": "2021-02-09"
}
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| Data volume | 101.1 MB | 101.1 MB |
| Unique views | 326 | 326 |
| Unique downloads | 69 | 69 |
- Publication date:
- February 9, 2021
- DOI:
-
- Grants:
-
European Commission:
- IONS4SET - Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology (688072)
- Related identifiers:
- Cites:
10.17815/jlsrf-3-159 - Identical to:
https://www.hzdr.de/publications/Publ-32276 - Referenced by:
10.1016/j.mne.2020.100074, https://www.hzdr.de/publications/Publ-32129 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International