Figure Open Access

Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Engelmann, Hans-Jürgen


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{
  "description": "<p>Energy-filtered transmission electron microscopy (EFTEM) images of stacked&nbsp;Si/SiO2/Si nanopillars</p>", 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "@id": "https://doi.org/10.14278/rodare.807", 
  "sameAs": [
    "https://www.hzdr.de/publications/Publ-32276"
  ], 
  "identifier": "https://doi.org/10.14278/rodare.807", 
  "datePublished": "2021-02-09", 
  "@context": "https://schema.org/", 
  "url": "https://rodare.hzdr.de/record/807", 
  "@type": "ImageObject", 
  "creator": [
    {
      "name": "Engelmann, Hans-J\u00fcrgen", 
      "affiliation": "HZDR", 
      "@type": "Person"
    }
  ], 
  "name": "Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration:  Figs. 1a, 1b and 5", 
  "contributor": [
    {
      "name": "von Borany, Johannes", 
      "affiliation": "HZDR", 
      "@type": "Person"
    }
  ]
}
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