Figure Open Access
Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5
Engelmann, Hans-Jürgen
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"description": "<p>Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars</p>",
"datePublished": "2021-02-09",
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| Data volume | 94.3 MB | 94.3 MB |
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| Unique downloads | 65 | 65 |
- Publication date:
- February 9, 2021
- DOI:
-
- Grants:
-
European Commission:
- IONS4SET - Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology (688072)
- Related identifiers:
- Cites:
10.17815/jlsrf-3-159 - Identical to:
https://www.hzdr.de/publications/Publ-32276 - Referenced by:
10.1016/j.mne.2020.100074, https://www.hzdr.de/publications/Publ-32129 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International