Figure Open Access
Engelmann, Hans-Jürgen
{
"conceptdoi": "10.14278/rodare.806",
"revision": 10,
"metadata": {
"doi": "10.14278/rodare.807",
"description": "<p>Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars</p>",
"access_right_category": "success",
"related_identifiers": [
{
"identifier": "10.17815/jlsrf-3-159",
"scheme": "doi",
"relation": "cites"
},
{
"identifier": "10.1016/j.mne.2020.100074",
"scheme": "doi",
"relation": "isReferencedBy"
},
{
"identifier": "https://www.hzdr.de/publications/Publ-32276",
"scheme": "url",
"relation": "isIdenticalTo"
},
{
"identifier": "https://www.hzdr.de/publications/Publ-32129",
"scheme": "url",
"relation": "isReferencedBy"
},
{
"identifier": "10.14278/rodare.806",
"scheme": "doi",
"relation": "isVersionOf"
}
],
"contributors": [
{
"name": "von Borany, Johannes",
"affiliation": "HZDR",
"type": "ProjectLeader"
}
],
"pub_id": "32276",
"grants": [
{
"links": {
"self": "https://rodare.hzdr.de/api/grants/10.13039/501100000780::688072"
},
"program": "H2020",
"funder": {
"doi": "10.13039/501100000780",
"name": "European Commission",
"acronyms": [
"EC"
],
"links": {
"self": "https://rodare.hzdr.de/api/funders/10.13039/501100000780"
}
},
"title": "Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology",
"acronym": "IONS4SET",
"code": "688072"
}
],
"doc_id": "1",
"creators": [
{
"name": "Engelmann, Hans-J\u00fcrgen",
"affiliation": "HZDR"
}
],
"resource_type": {
"subtype": "figure",
"type": "image",
"title": "Figure"
},
"communities": [
{
"id": "ecfunded"
},
{
"id": "fwi"
},
{
"id": "ibc"
},
{
"id": "matter"
},
{
"id": "rodare"
}
],
"title": "Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5",
"access_right": "open",
"license": {
"id": "CC-BY-4.0"
},
"publication_date": "2021-02-09",
"relations": {
"version": [
{
"count": 1,
"is_last": true,
"index": 0,
"parent": {
"pid_type": "recid",
"pid_value": "806"
},
"last_child": {
"pid_type": "recid",
"pid_value": "807"
}
}
]
}
},
"links": {
"badge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.807.svg",
"doi": "https://doi.org/10.14278/rodare.807",
"conceptbadge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.806.svg",
"conceptdoi": "https://doi.org/10.14278/rodare.806",
"thumb250": "https://rodare.hzdr.de/api/iiif/v2/2e25ceed-a35e-45c4-9968-761095ee35f3:a6fa173a-0789-4d53-9dca-b43a460c69e3:Fig.%201a.tif/full/250,/0/default.jpg",
"bucket": "https://rodare.hzdr.de/api/files/2e25ceed-a35e-45c4-9968-761095ee35f3",
"html": "https://rodare.hzdr.de/record/807",
"latest": "https://rodare.hzdr.de/api/records/807",
"latest_html": "https://rodare.hzdr.de/record/807"
},
"updated": "2024-08-13T12:15:05.120092+00:00",
"conceptrecid": "806",
"stats": {
"volume": 146146664.0,
"unique_downloads": 100.0,
"version_unique_downloads": 100.0,
"unique_views": 604.0,
"downloads": 131.0,
"version_unique_views": 604.0,
"version_views": 761.0,
"version_downloads": 131.0,
"version_volume": 146146664.0,
"views": 761.0
},
"created": "2021-02-09T08:09:53.514637+00:00",
"owners": [
316
],
"doi": "10.14278/rodare.807",
"files": [
{
"checksum": "md5:967c1e01ce093cc8313f10c51a4f44f6",
"links": {
"self": "https://rodare.hzdr.de/api/files/2e25ceed-a35e-45c4-9968-761095ee35f3/Fig.%201a.tif"
},
"key": "Fig. 1a.tif",
"size": 946714,
"type": "tif",
"bucket": "2e25ceed-a35e-45c4-9968-761095ee35f3"
},
{
"checksum": "md5:0f0ea00593998e0128970acd63a1b4eb",
"links": {
"self": "https://rodare.hzdr.de/api/files/2e25ceed-a35e-45c4-9968-761095ee35f3/Fig.%201b.tif"
},
"key": "Fig. 1b.tif",
"size": 994092,
"type": "tif",
"bucket": "2e25ceed-a35e-45c4-9968-761095ee35f3"
},
{
"checksum": "md5:161249b8ed1f0b7f34c02a641f47e0c1",
"links": {
"self": "https://rodare.hzdr.de/api/files/2e25ceed-a35e-45c4-9968-761095ee35f3/Fig.%205.tif"
},
"key": "Fig. 5.tif",
"size": 1446592,
"type": "tif",
"bucket": "2e25ceed-a35e-45c4-9968-761095ee35f3"
}
],
"id": 807
}
| All versions | This version | |
|---|---|---|
| Views | 761 | 761 |
| Downloads | 131 | 131 |
| Data volume | 146.1 MB | 146.1 MB |
| Unique views | 604 | 604 |
| Unique downloads | 100 | 100 |