February 9, 2021 Figure Open Access

Engelmann, Hans-Jürgen

DCAT Export

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    <dct:title>Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5</dct:title>
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    <dct:description>&lt;p&gt;Energy-filtered transmission electron microscopy (EFTEM) images of stacked&amp;nbsp;Si/SiO2/Si nanopillars&lt;/p&gt;</dct:description>
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