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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas


MARC21 XML Export

<?xml version='1.0' encoding='UTF-8'?>
<record xmlns="http://www.loc.gov/MARC21/slim">
  <leader>00000nmm##2200000uu#4500</leader>
  <datafield tag="520" ind1=" " ind2=" ">
    <subfield code="a">&lt;p&gt;Data to&amp;nbsp;ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy&lt;/p&gt;</subfield>
  </datafield>
  <datafield tag="650" ind1="1" ind2="7">
    <subfield code="a">cc-by</subfield>
    <subfield code="2">opendefinition.org</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-hzdr</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-rodare</subfield>
  </datafield>
  <datafield tag="909" ind1="C" ind2="O">
    <subfield code="o">oai:rodare.hzdr.de:322</subfield>
    <subfield code="p">openaire_data</subfield>
    <subfield code="p">user-hzdr</subfield>
    <subfield code="p">user-rodare</subfield>
  </datafield>
  <datafield tag="041" ind1=" " ind2=" ">
    <subfield code="a">eng</subfield>
  </datafield>
  <datafield tag="542" ind1=" " ind2=" ">
    <subfield code="l">open</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">PALS, FTIR, ULK, Curing</subfield>
  </datafield>
  <controlfield tag="001">322</controlfield>
  <datafield tag="245" ind1=" " ind2=" ">
    <subfield code="a">Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties</subfield>
  </datafield>
  <datafield tag="024" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.322</subfield>
    <subfield code="2">doi</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="c">2020-05-11</subfield>
  </datafield>
  <datafield tag="540" ind1=" " ind2=" ">
    <subfield code="u">https://creativecommons.org/licenses/by/4.0/legalcode</subfield>
    <subfield code="a">Creative Commons Attribution 4.0 International</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Koehler, Nicole</subfield>
    <subfield code="u">Center for Microtechnologies, Chemnitz University of Technology</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Liedke, Maciej Oskar</subfield>
    <subfield code="u">Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</subfield>
    <subfield code="0">(orcid)0000-0001-7933-7295</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Butterling, Maik</subfield>
    <subfield code="u">Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</subfield>
    <subfield code="0">(orcid)0000-0003-3674-0767</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Hirschmann, Eric</subfield>
    <subfield code="u">Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</subfield>
    <subfield code="0">(orcid)0000-0001-5782-9627</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Ecke, Ramona</subfield>
    <subfield code="u">Fraunhofer ENAS, Chemnitz, Germany</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Schulz, Stefan E.</subfield>
    <subfield code="u">Center for Microtechnologies, Chemnitz University of Technology</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Wagner, Andreas</subfield>
    <subfield code="u">Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</subfield>
    <subfield code="0">(orcid)0000-0001-7575-3961</subfield>
  </datafield>
  <controlfield tag="005">20200804083240.0</controlfield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-31002</subfield>
    <subfield code="i">isIdenticalTo</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-31402</subfield>
    <subfield code="i">isSupplementTo</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.321</subfield>
    <subfield code="i">isVersionOf</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">dataset</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2=" ">
    <subfield code="s">56640671</subfield>
    <subfield code="u">https://rodare.hzdr.de/record/322/files/Data.rar</subfield>
    <subfield code="z">md5:00b2a8e46a23b5094929449781284494</subfield>
  </datafield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="a">Elsherif, Ahmed Gamal Attallah</subfield>
    <subfield code="u">Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</subfield>
    <subfield code="0">(orcid)0000-0002-7759-0315</subfield>
  </datafield>
</record>
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