Dataset Open Access

Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas


GeoJSON Export

{
  "type": "FeatureCollection", 
  "features": []
}
27
2
views
downloads
All versions This version
Views 2727
Downloads 22
Data volume 113.3 MB113.3 MB
Unique views 2020
Unique downloads 22

Share

Cite as