Dataset Open Access
Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties
Elsherif, Ahmed Gamal Attallah;
Koehler, Nicole;
Liedke, Maciej Oskar;
Butterling, Maik;
Hirschmann, Eric;
Ecke, Ramona;
Schulz, Stefan E.;
Wagner, Andreas
BibTeX Export
@misc{elsherif_ahmed_gamal_attallah_2020_322,
author = {Elsherif, Ahmed Gamal Attallah and
Koehler, Nicole and
Liedke, Maciej Oskar and
Butterling, Maik and
Hirschmann, Eric and
Ecke, Ramona and
Schulz, Stefan E. and
Wagner, Andreas},
title = {{Thermal kinetics of free volume in porous spin-on
dielectrics: exploring the network- and pore-
properties}},
month = may,
year = 2020,
doi = {10.14278/rodare.322},
url = {https://doi.org/10.14278/rodare.322}
}
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|---|---|---|
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| Data volume | 24.1 GB | 24.1 GB |
| Unique views | 1,263 | 1,261 |
| Unique downloads | 152 | 152 |
- Publication date:
- May 11, 2020
- DOI:
-
- Keyword(s):
- PALS FTIR ULK Curing
- Related identifiers:
- Cites:
10.17815/jlsrf-2-58 - Identical to:
https://www.hzdr.de/publications/Publ-31002 - Referenced by:
10.1016/j.micromeso.2020.110457, https://www.hzdr.de/publications/Publ-31402 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International