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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas

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@misc{elsherif_ahmed_gamal_attallah_2020_322,
  author       = {Elsherif, Ahmed Gamal Attallah and
                  Koehler, Nicole and
                  Liedke, Maciej Oskar and
                  Butterling, Maik and
                  Hirschmann, Eric and
                  Ecke, Ramona and
                  Schulz, Stefan E. and
                  Wagner, Andreas},
  title        = {{Thermal kinetics of free volume in porous spin-on 
                   dielectrics: exploring the network- and pore-
                   properties}},
  month        = may,
  year         = 2020,
  doi          = {10.14278/rodare.322},
  url          = {https://doi.org/10.14278/rodare.322}
}
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Publication date:
May 11, 2020
DOI:
10.14278/rodare.322

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10.14278/rodare.322

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Keyword(s):
PALS FTIR ULK Curing
Related identifiers:
Cites:
10.17815/jlsrf-2-58
Identical to:
https://www.hzdr.de/publications/Publ-31002
Referenced by:
10.1016/j.micromeso.2020.110457, https://www.hzdr.de/publications/Publ-31402
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License (for files):
Creative Commons Attribution 4.0 International

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