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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas


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      <creatorName>Elsherif, Ahmed Gamal Attallah</creatorName>
      <givenName>Ahmed Gamal Attallah</givenName>
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      <creatorName>Koehler, Nicole</creatorName>
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      <creatorName>Liedke, Maciej Oskar</creatorName>
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      <creatorName>Butterling, Maik</creatorName>
      <givenName>Maik</givenName>
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      <affiliation>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</affiliation>
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    <creator>
      <creatorName>Hirschmann, Eric</creatorName>
      <givenName>Eric</givenName>
      <familyName>Hirschmann</familyName>
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      <affiliation>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</affiliation>
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    <creator>
      <creatorName>Ecke, Ramona</creatorName>
      <givenName>Ramona</givenName>
      <familyName>Ecke</familyName>
      <affiliation>Fraunhofer ENAS, Chemnitz, Germany</affiliation>
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    <creator>
      <creatorName>Schulz, Stefan E.</creatorName>
      <givenName>Stefan E.</givenName>
      <familyName>Schulz</familyName>
      <affiliation>Center for Microtechnologies, Chemnitz University of Technology</affiliation>
    </creator>
    <creator>
      <creatorName>Wagner, Andreas</creatorName>
      <givenName>Andreas</givenName>
      <familyName>Wagner</familyName>
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      <affiliation>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</affiliation>
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  <titles>
    <title>Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2020</publicationYear>
  <subjects>
    <subject>PALS, FTIR, ULK, Curing</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2020-05-11</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="Dataset"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/322</alternateIdentifier>
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  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Data to&amp;nbsp;ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy&lt;/p&gt;</description>
  </descriptions>
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