Dataset Open Access
Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties
Elsherif, Ahmed Gamal Attallah;
Koehler, Nicole;
Liedke, Maciej Oskar;
Butterling, Maik;
Hirschmann, Eric;
Ecke, Ramona;
Schulz, Stefan E.;
Wagner, Andreas
Citation Style Language JSON Export
{
"abstract": "<p>Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy</p>",
"issued": {
"date-parts": [
[
2020,
5,
11
]
]
},
"language": "eng",
"author": [
{
"family": "Elsherif, Ahmed Gamal Attallah"
},
{
"family": "Koehler, Nicole"
},
{
"family": "Liedke, Maciej Oskar"
},
{
"family": "Butterling, Maik"
},
{
"family": "Hirschmann, Eric"
},
{
"family": "Ecke, Ramona"
},
{
"family": "Schulz, Stefan E."
},
{
"family": "Wagner, Andreas"
}
],
"title": "Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties",
"DOI": "10.14278/rodare.322",
"type": "dataset",
"id": "322",
"publisher": "Rodare"
}
1,349
412
views
downloads
| All versions | This version | |
|---|---|---|
| Views | 1,349 | 1,347 |
| Downloads | 412 | 412 |
| Data volume | 23.3 GB | 23.3 GB |
| Unique views | 860 | 858 |
| Unique downloads | 138 | 138 |
- Publication date:
- May 11, 2020
- DOI:
-
- Keyword(s):
- PALS FTIR ULK Curing
- Related identifiers:
- Cites:
10.17815/jlsrf-2-58 - Identical to:
https://www.hzdr.de/publications/Publ-31002 - Referenced by:
10.1016/j.micromeso.2020.110457, https://www.hzdr.de/publications/Publ-31402 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International