Dataset Open Access

Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas

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{
  "type": "dataset", 
  "abstract": "<p>Data to\u00a0ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy</p>", 
  "language": "eng", 
  "author": [
    {
      "family": "Elsherif, Ahmed Gamal Attallah"
    }, 
    {
      "family": "Koehler, Nicole"
    }, 
    {
      "family": "Liedke, Maciej Oskar"
    }, 
    {
      "family": "Butterling, Maik"
    }, 
    {
      "family": "Hirschmann, Eric"
    }, 
    {
      "family": "Ecke, Ramona"
    }, 
    {
      "family": "Schulz, Stefan E."
    }, 
    {
      "family": "Wagner, Andreas"
    }
  ], 
  "DOI": "10.14278/rodare.322", 
  "issued": {
    "date-parts": [
      [
        2020, 
        5, 
        11
      ]
    ]
  }, 
  "title": "Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties", 
  "publisher": "Rodare", 
  "id": "322"
}
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Publication date:
May 11, 2020
DOI:
10.14278/rodare.322

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10.14278/rodare.322

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Keyword(s):
PALS FTIR ULK Curing
Related identifiers:
Cites:
10.17815/jlsrf-2-58
Identical to:
https://www.hzdr.de/publications/Publ-31002
Referenced by:
10.1016/j.micromeso.2020.110457, https://www.hzdr.de/publications/Publ-31402
Communities:
License (for files):
Creative Commons Attribution 4.0 International

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Version 1 10.14278/rodare.322 May 11, 2020
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