May 11, 2020 Dataset Open Access

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas

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    "title": "Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties", 
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