Dataset Open Access

Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas


JSON Export

{
  "metadata": {
    "keywords": [
      "PALS, FTIR, ULK, Curing"
    ], 
    "license": {
      "id": "CC-BY-4.0"
    }, 
    "description": "<p>Data to&nbsp;ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy</p>", 
    "doc_id": "1", 
    "creators": [
      {
        "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
        "orcid": "0000-0002-7759-0315", 
        "name": "Elsherif, Ahmed Gamal Attallah"
      }, 
      {
        "affiliation": "Center for Microtechnologies, Chemnitz University of Technology", 
        "name": "Koehler, Nicole"
      }, 
      {
        "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
        "orcid": "0000-0001-7933-7295", 
        "name": "Liedke, Maciej Oskar"
      }, 
      {
        "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
        "orcid": "0000-0003-3674-0767", 
        "name": "Butterling, Maik"
      }, 
      {
        "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
        "orcid": "0000-0001-5782-9627", 
        "name": "Hirschmann, Eric"
      }, 
      {
        "affiliation": "Fraunhofer ENAS, Chemnitz, Germany", 
        "name": "Ecke, Ramona"
      }, 
      {
        "affiliation": "Center for Microtechnologies, Chemnitz University of Technology", 
        "name": "Schulz, Stefan E."
      }, 
      {
        "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
        "orcid": "0000-0001-7575-3961", 
        "name": "Wagner, Andreas"
      }
    ], 
    "access_right_category": "success", 
    "title": "Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties", 
    "communities": [
      {
        "id": "hzdr"
      }, 
      {
        "id": "rodare"
      }
    ], 
    "relations": {
      "version": [
        {
          "is_last": true, 
          "index": 0, 
          "count": 1, 
          "parent": {
            "pid_type": "recid", 
            "pid_value": "321"
          }, 
          "last_child": {
            "pid_type": "recid", 
            "pid_value": "322"
          }
        }
      ]
    }, 
    "related_identifiers": [
      {
        "identifier": "https://www.hzdr.de/publications/Publ-31002", 
        "scheme": "url", 
        "relation": "isIdenticalTo"
      }, 
      {
        "identifier": "https://www.hzdr.de/publications/Publ-31402", 
        "scheme": "url", 
        "relation": "isSupplementTo"
      }, 
      {
        "identifier": "10.14278/rodare.321", 
        "scheme": "doi", 
        "relation": "isVersionOf"
      }
    ], 
    "access_right": "open", 
    "doi": "10.14278/rodare.322", 
    "language": "eng", 
    "pub_id": "31002", 
    "resource_type": {
      "type": "dataset", 
      "title": "Dataset"
    }, 
    "publication_date": "2020-05-11"
  }, 
  "revision": 7, 
  "updated": "2020-08-04T08:32:40.601367+00:00", 
  "files": [
    {
      "type": "rar", 
      "size": 56640671, 
      "links": {
        "self": "https://rodare.hzdr.de/api/files/5ce4d1a3-4f72-4d48-b2fb-f83bd087c0ee/Data.rar"
      }, 
      "key": "Data.rar", 
      "checksum": "md5:00b2a8e46a23b5094929449781284494", 
      "bucket": "5ce4d1a3-4f72-4d48-b2fb-f83bd087c0ee"
    }
  ], 
  "conceptdoi": "10.14278/rodare.321", 
  "doi": "10.14278/rodare.322", 
  "created": "2020-05-11T08:17:22.902792+00:00", 
  "conceptrecid": "321", 
  "id": 322, 
  "links": {
    "badge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.322.svg", 
    "doi": "https://doi.org/10.14278/rodare.322", 
    "conceptbadge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.321.svg", 
    "conceptdoi": "https://doi.org/10.14278/rodare.321", 
    "bucket": "https://rodare.hzdr.de/api/files/5ce4d1a3-4f72-4d48-b2fb-f83bd087c0ee", 
    "html": "https://rodare.hzdr.de/record/322", 
    "latest": "https://rodare.hzdr.de/api/records/322", 
    "latest_html": "https://rodare.hzdr.de/record/322"
  }, 
  "stats": {
    "volume": 736328723.0, 
    "unique_downloads": 11.0, 
    "version_unique_downloads": 11.0, 
    "unique_views": 70.0, 
    "downloads": 13.0, 
    "version_unique_views": 70.0, 
    "version_views": 101.0, 
    "version_downloads": 13.0, 
    "version_volume": 736328723.0, 
    "views": 101.0
  }, 
  "owners": [
    174
  ]
}
101
13
views
downloads
All versions This version
Views 101101
Downloads 1313
Data volume 736.3 MB736.3 MB
Unique views 7070
Unique downloads 1111

Share

Cite as