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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas


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  <dc:creator>Elsherif, Ahmed Gamal Attallah</dc:creator>
  <dc:creator>Koehler, Nicole</dc:creator>
  <dc:creator>Liedke, Maciej Oskar</dc:creator>
  <dc:creator>Butterling, Maik</dc:creator>
  <dc:creator>Hirschmann, Eric</dc:creator>
  <dc:creator>Ecke, Ramona</dc:creator>
  <dc:creator>Schulz, Stefan E.</dc:creator>
  <dc:creator>Wagner, Andreas</dc:creator>
  <dc:date>2020-05-11</dc:date>
  <dc:description>Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy</dc:description>
  <dc:identifier>https://rodare.hzdr.de/record/322</dc:identifier>
  <dc:identifier>10.14278/rodare.322</dc:identifier>
  <dc:identifier>oai:rodare.hzdr.de:322</dc:identifier>
  <dc:language>eng</dc:language>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-31002</dc:relation>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-31402</dc:relation>
  <dc:relation>doi:10.14278/rodare.321</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/hzdr</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/rodare</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:subject>PALS, FTIR, ULK, Curing</dc:subject>
  <dc:title>Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties</dc:title>
  <dc:type>info:eu-repo/semantics/other</dc:type>
  <dc:type>dataset</dc:type>
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