Dataset Open Access

Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas


JSON-LD (schema.org) Export

{
  "@type": "Dataset", 
  "description": "<p>Data to&nbsp;ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy</p>", 
  "distribution": [
    {
      "contentUrl": "https://rodare.hzdr.de/api/files/5ce4d1a3-4f72-4d48-b2fb-f83bd087c0ee/Data.rar", 
      "fileFormat": "rar", 
      "@type": "DataDownload"
    }
  ], 
  "creator": [
    {
      "@id": "https://orcid.org/0000-0002-7759-0315", 
      "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
      "@type": "Person", 
      "name": "Elsherif, Ahmed Gamal Attallah"
    }, 
    {
      "affiliation": "Center for Microtechnologies, Chemnitz University of Technology", 
      "@type": "Person", 
      "name": "Koehler, Nicole"
    }, 
    {
      "@id": "https://orcid.org/0000-0001-7933-7295", 
      "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
      "@type": "Person", 
      "name": "Liedke, Maciej Oskar"
    }, 
    {
      "@id": "https://orcid.org/0000-0003-3674-0767", 
      "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
      "@type": "Person", 
      "name": "Butterling, Maik"
    }, 
    {
      "@id": "https://orcid.org/0000-0001-5782-9627", 
      "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
      "@type": "Person", 
      "name": "Hirschmann, Eric"
    }, 
    {
      "affiliation": "Fraunhofer ENAS, Chemnitz, Germany", 
      "@type": "Person", 
      "name": "Ecke, Ramona"
    }, 
    {
      "affiliation": "Center for Microtechnologies, Chemnitz University of Technology", 
      "@type": "Person", 
      "name": "Schulz, Stefan E."
    }, 
    {
      "@id": "https://orcid.org/0000-0001-7575-3961", 
      "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics", 
      "@type": "Person", 
      "name": "Wagner, Andreas"
    }
  ], 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "url": "https://rodare.hzdr.de/record/322", 
  "sameAs": [
    "https://www.hzdr.de/publications/Publ-31002"
  ], 
  "datePublished": "2020-05-11", 
  "@context": "https://schema.org/", 
  "keywords": [
    "PALS, FTIR, ULK, Curing"
  ], 
  "identifier": "https://doi.org/10.14278/rodare.322", 
  "name": "Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties", 
  "@id": "https://doi.org/10.14278/rodare.322", 
  "inLanguage": {
    "alternateName": "eng", 
    "@type": "Language", 
    "name": "English"
  }
}
27
2
views
downloads
All versions This version
Views 2727
Downloads 22
Data volume 113.3 MB113.3 MB
Unique views 2020
Unique downloads 22

Share

Cite as