May 11, 2020 Dataset Open Access

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas

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  "datePublished": "2020-05-11", 
  "name": "Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties", 
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      "name": "Elsherif, Ahmed Gamal Attallah", 
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      "name": "Koehler, Nicole", 
      "affiliation": "Center for Microtechnologies, Chemnitz University of Technology"
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      "name": "Ecke, Ramona", 
      "affiliation": "Fraunhofer ENAS, Chemnitz, Germany"
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      "name": "Schulz, Stefan E.", 
      "affiliation": "Center for Microtechnologies, Chemnitz University of Technology"
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      "affiliation": "Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics"
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  "keywords": [
    "PALS", 
    "FTIR", 
    "ULK", 
    "Curing"
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  "identifier": "https://doi.org/10.14278/rodare.322", 
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  "description": "<p>Data to&nbsp;ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy</p>"
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