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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas

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<?xml version='1.0' encoding='utf-8'?>
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:adms="http://www.w3.org/ns/adms#" xmlns:cnt="http://www.w3.org/2011/content#" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dct="http://purl.org/dc/terms/" xmlns:dctype="http://purl.org/dc/dcmitype/" xmlns:dcat="http://www.w3.org/ns/dcat#" xmlns:duv="http://www.w3.org/ns/duv#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:frapo="http://purl.org/cerif/frapo/" xmlns:geo="http://www.w3.org/2003/01/geo/wgs84_pos#" xmlns:gsp="http://www.opengis.net/ont/geosparql#" xmlns:locn="http://www.w3.org/ns/locn#" xmlns:org="http://www.w3.org/ns/org#" xmlns:owl="http://www.w3.org/2002/07/owl#" xmlns:prov="http://www.w3.org/ns/prov#" xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#" xmlns:schema="http://schema.org/" xmlns:skos="http://www.w3.org/2004/02/skos/core#" xmlns:vcard="http://www.w3.org/2006/vcard/ns#" xmlns:wdrs="http://www.w3.org/2007/05/powder-s#">
  <rdf:Description rdf:about="https://doi.org/10.14278/rodare.322">
    <rdf:type rdf:resource="http://www.w3.org/ns/dcat#Dataset"/>
    <dct:type rdf:resource="http://purl.org/dc/dcmitype/Dataset"/>
    <dct:identifier rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://doi.org/10.14278/rodare.322</dct:identifier>
    <foaf:page rdf:resource="https://doi.org/10.14278/rodare.322"/>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0002-7759-0315">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Elsherif, Ahmed Gamal Attallah</foaf:name>
        <foaf:givenName>Ahmed Gamal Attallah</foaf:givenName>
        <foaf:familyName>Elsherif</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Koehler, Nicole</foaf:name>
        <foaf:givenName>Nicole</foaf:givenName>
        <foaf:familyName>Koehler</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Center for Microtechnologies, Chemnitz University of Technology</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0001-7933-7295">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Liedke, Maciej Oskar</foaf:name>
        <foaf:givenName>Maciej Oskar</foaf:givenName>
        <foaf:familyName>Liedke</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0003-3674-0767">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Butterling, Maik</foaf:name>
        <foaf:givenName>Maik</foaf:givenName>
        <foaf:familyName>Butterling</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0001-5782-9627">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Hirschmann, Eric</foaf:name>
        <foaf:givenName>Eric</foaf:givenName>
        <foaf:familyName>Hirschmann</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Ecke, Ramona</foaf:name>
        <foaf:givenName>Ramona</foaf:givenName>
        <foaf:familyName>Ecke</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Fraunhofer ENAS, Chemnitz, Germany</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Schulz, Stefan E.</foaf:name>
        <foaf:givenName>Stefan E.</foaf:givenName>
        <foaf:familyName>Schulz</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Center for Microtechnologies, Chemnitz University of Technology</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0001-7575-3961">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Wagner, Andreas</foaf:name>
        <foaf:givenName>Andreas</foaf:givenName>
        <foaf:familyName>Wagner</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:title>Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties</dct:title>
    <dct:publisher>
      <foaf:Agent>
        <foaf:name>Rodare</foaf:name>
      </foaf:Agent>
    </dct:publisher>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#gYear">2020</dct:issued>
    <dcat:keyword>PALS</dcat:keyword>
    <dcat:keyword>FTIR</dcat:keyword>
    <dcat:keyword>ULK</dcat:keyword>
    <dcat:keyword>Curing</dcat:keyword>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2020-05-11</dct:issued>
    <dct:language rdf:resource="http://publications.europa.eu/resource/authority/language/ENG"/>
    <owl:sameAs rdf:resource="https://rodare.hzdr.de/record/322"/>
    <adms:identifier>
      <adms:Identifier>
        <skos:notation rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://rodare.hzdr.de/record/322</skos:notation>
      </adms:Identifier>
    </adms:identifier>
    <dct:relation rdf:resource="https://doi.org/10.17815/jlsrf-2-58"/>
    <dct:isReferencedBy rdf:resource="https://doi.org/10.1016/j.micromeso.2020.110457"/>
    <owl:sameAs rdf:resource="https://www.hzdr.de/publications/Publ-31002"/>
    <dct:isReferencedBy rdf:resource="https://www.hzdr.de/publications/Publ-31402"/>
    <dct:isVersionOf rdf:resource="https://doi.org/10.14278/rodare.321"/>
    <dct:isPartOf rdf:resource="https://rodare.hzdr.de/communities/hzdr"/>
    <dct:isPartOf rdf:resource="https://rodare.hzdr.de/communities/rodare"/>
    <dct:description>&lt;p&gt;Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy&lt;/p&gt;</dct:description>
    <dct:accessRights rdf:resource="http://publications.europa.eu/resource/authority/access-right/PUBLIC"/>
    <dct:accessRights>
      <dct:RightsStatement rdf:about="info:eu-repo/semantics/openAccess">
        <rdfs:label>Open Access</rdfs:label>
      </dct:RightsStatement>
    </dct:accessRights>
    <dcat:distribution>
      <dcat:Distribution>
        <dct:rights>
          <dct:RightsStatement rdf:about="https://creativecommons.org/licenses/by/4.0/legalcode">
            <rdfs:label>Creative Commons Attribution 4.0 International</rdfs:label>
          </dct:RightsStatement>
        </dct:rights>
        <dcat:accessURL rdf:resource="https://doi.org/10.14278/rodare.322"/>
      </dcat:Distribution>
    </dcat:distribution>
  </rdf:Description>
</rdf:RDF>
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Publication date:
May 11, 2020
DOI:
10.14278/rodare.322

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10.14278/rodare.322

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.. image:: https://rodare.hzdr.de/badge/DOI/10.14278/rodare.322.svg
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<a href="https://doi.org/10.14278/rodare.322"><img src="https://rodare.hzdr.de/badge/DOI/10.14278/rodare.322.svg" alt="DOI"></a>

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Keyword(s):
PALS FTIR ULK Curing
Related identifiers:
Cites:
10.17815/jlsrf-2-58
Identical to:
https://www.hzdr.de/publications/Publ-31002
Referenced by:
10.1016/j.micromeso.2020.110457, https://www.hzdr.de/publications/Publ-31402
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