Dataset Open Access

Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, Ahmed Gamal Attallah; Koehler, Nicole; Liedke, Maciej Oskar; Butterling, Maik; Hirschmann, Eric; Ecke, Ramona; Schulz, Stefan E.; Wagner, Andreas

Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy

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Publication date:
May 11, 2020
DOI:
10.14278/rodare.322

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10.14278/rodare.322

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Keyword(s):
PALS FTIR ULK Curing
Related identifiers:
Cites:
10.17815/jlsrf-2-58
Identical to:
https://www.hzdr.de/publications/Publ-31002
Referenced by:
10.1016/j.micromeso.2020.110457, https://www.hzdr.de/publications/Publ-31402
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License (for files):
Creative Commons Attribution 4.0 International

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Version 1 10.14278/rodare.322 May 11, 2020
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