Dataset Open Access

Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian


MARC21 XML Export

<?xml version='1.0' encoding='UTF-8'?>
<record xmlns="http://www.loc.gov/MARC21/slim">
  <leader>00000nmm##2200000uu#4500</leader>
  <datafield tag="856" ind1="4" ind2=" ">
    <subfield code="s">19542845</subfield>
    <subfield code="u">https://rodare.hzdr.de/record/2293/files/RawData_for_Rodare.zip</subfield>
    <subfield code="z">md5:4034ecc5f0a2df8df528e903474da2ef</subfield>
  </datafield>
  <datafield tag="540" ind1=" " ind2=" ">
    <subfield code="u">https://creativecommons.org/licenses/by/4.0/legalcode</subfield>
    <subfield code="a">Creative Commons Attribution 4.0 International</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="c">2023-05-08</subfield>
  </datafield>
  <datafield tag="520" ind1=" " ind2=" ">
    <subfield code="a">&lt;p&gt;Measured raw data (XRD, texture, SEM, PPMS and EDX)&lt;/p&gt;</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-fwi</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-hzdr</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-matter</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-rodare</subfield>
  </datafield>
  <datafield tag="542" ind1=" " ind2=" ">
    <subfield code="l">open</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">dataset</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-36937</subfield>
    <subfield code="i">isIdenticalTo</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-37186</subfield>
    <subfield code="i">isReferencedBy</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.2292</subfield>
    <subfield code="i">isVersionOf</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <datafield tag="024" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.2293</subfield>
    <subfield code="2">doi</subfield>
  </datafield>
  <datafield tag="909" ind1="C" ind2="O">
    <subfield code="o">oai:rodare.hzdr.de:2293</subfield>
    <subfield code="p">openaire_data</subfield>
    <subfield code="p">user-rodare</subfield>
    <subfield code="p">user-matter</subfield>
    <subfield code="p">user-fwi</subfield>
    <subfield code="p">user-hzdr</subfield>
  </datafield>
  <datafield tag="650" ind1="1" ind2="7">
    <subfield code="a">cc-by</subfield>
    <subfield code="2">opendefinition.org</subfield>
  </datafield>
  <controlfield tag="001">2293</controlfield>
  <controlfield tag="005">20230628085222.0</controlfield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="a">Fink, Lukas</subfield>
    <subfield code="u">1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</subfield>
    <subfield code="0">(orcid)0000-0002-3118-6114</subfield>
  </datafield>
  <datafield tag="245" ind1=" " ind2=" ">
    <subfield code="a">Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Magnetic shape memory alloys</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Silicon microtechnology</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Ni2MnGa</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">NiTi</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Epitaxial film growth</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Kar, Satyakam</subfield>
    <subfield code="u">Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstraße 20, 01069 Dresden, Germany</subfield>
    <subfield code="0">(orcid)0000-0003-1352-8026</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Lünser, Klara</subfield>
    <subfield code="u">1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</subfield>
    <subfield code="0">(orcid)0000-0003-3309-7948</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Nielsch, Kornelius</subfield>
    <subfield code="u">Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstraße 20, 01069 Dresden, Germany</subfield>
    <subfield code="0">(orcid)0000-0003-2271-7726</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Reith, Heiko</subfield>
    <subfield code="u">Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstraße 20, 01069 Dresden, Germany</subfield>
    <subfield code="0">(orcid)0000-0003-1662-3774</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Fähler, Sebastian</subfield>
    <subfield code="u">1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</subfield>
    <subfield code="0">(orcid)0000-0001-9450-4952</subfield>
  </datafield>
  <datafield tag="041" ind1=" " ind2=" ">
    <subfield code="a">eng</subfield>
  </datafield>
</record>
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