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Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian


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Fink, Lukas, Kar, Satyakam, Lünser, Klara, Nielsch, Kornelius, Reith, Heiko, & Fähler, Sebastian. (2023). Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology [Data set]. Rodare. http://doi.org/10.14278/rodare.2293

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