Dataset Open Access
Fink, Lukas;
Kar, Satyakam;
Lünser, Klara;
Nielsch, Kornelius;
Reith, Heiko;
Fähler, Sebastian
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rdf:about="http://orcid.org/0000-0001-9450-4952"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Fähler, Sebastian</foaf:name> <foaf:givenName>Sebastian</foaf:givenName> <foaf:familyName>Fähler</foaf:familyName> <org:memberOf> <foaf:Organization> <foaf:name>1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</foaf:name> </foaf:Organization> </org:memberOf> </rdf:Description> </dct:creator> <dct:title>Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology</dct:title> <dct:publisher> <foaf:Agent> <foaf:name>Rodare</foaf:name> </foaf:Agent> </dct:publisher> <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#gYear">2023</dct:issued> <dcat:keyword>Magnetic shape memory alloys</dcat:keyword> <dcat:keyword>Silicon microtechnology</dcat:keyword> <dcat:keyword>Ni2MnGa</dcat:keyword> <dcat:keyword>NiTi</dcat:keyword> 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