Dataset Open Access

Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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Publication date:
May 8, 2023
DOI:
10.14278/rodare.2293

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10.14278/rodare.2293

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Keyword(s):
Magnetic shape memory alloys Silicon microtechnology Ni2MnGa NiTi Epitaxial film growth
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Identical to:
https://www.hzdr.de/publications/Publ-36937
Referenced by:
https://www.hzdr.de/publications/Publ-37186
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License (for files):
Creative Commons Attribution 4.0 International

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