Dataset Open Access

Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

BibTeX Export

@misc{fink_lukas_2023_2293,
  author       = {Fink, Lukas and
                  Kar, Satyakam and
                  Lünser, Klara and
                  Nielsch, Kornelius and
                  Reith, Heiko and
                  Fähler, Sebastian},
  title        = {{Data publication: Integration of Multifunctional 
                   Epitaxial (Magnetic) Shape Memory Films in Silicon
                   Microtechnology}},
  month        = may,
  year         = 2023,
  doi          = {10.14278/rodare.2293},
  url          = {https://doi.org/10.14278/rodare.2293}
}
894
15
views
downloads
All versions This version
Views 894894
Downloads 1515
Data volume 293.1 MB293.1 MB
Unique views 845845
Unique downloads 1515
More info on how stats are collected.
Publication date:
May 8, 2023
DOI:
10.14278/rodare.2293

RODARE DOI Badge

DOI 

10.14278/rodare.2293

Markdown 

[![DOI](https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg)](https://doi.org/10.14278/rodare.2293)

reStructedText 

.. image:: https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg
   :target: https://doi.org/10.14278/rodare.2293

HTML 

<a href="https://doi.org/10.14278/rodare.2293"><img src="https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg" alt="DOI"></a>

Image URL 

https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg

Target URL 

https://doi.org/10.14278/rodare.2293

Keyword(s):
Magnetic shape memory alloys Silicon microtechnology Ni2MnGa NiTi Epitaxial film growth
Related identifiers:
Identical to:
https://www.hzdr.de/publications/Publ-36937
Referenced by:
https://www.hzdr.de/publications/Publ-37186
Communities:
License (for files):
Creative Commons Attribution 4.0 International

Versions

Version 1 10.14278/rodare.2293 May 8, 2023
Cite all versions? You can cite all versions by using the DOI 10.14278/rodare.2292. This DOI represents all versions, and will always resolve to the latest one. Read more.

Share

Cite as

Export