Dataset Open Access

Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

BibTeX Export

@misc{fink_lukas_2023_2293,
  author       = {Fink, Lukas and
                  Kar, Satyakam and
                  Lünser, Klara and
                  Nielsch, Kornelius and
                  Reith, Heiko and
                  Fähler, Sebastian},
  title        = {{Data publication: Integration of Multifunctional 
                   Epitaxial (Magnetic) Shape Memory Films in Silicon
                   Microtechnology}},
  month        = may,
  year         = 2023,
  doi          = {10.14278/rodare.2293},
  url          = {https://doi.org/10.14278/rodare.2293}
}
209
3
views
downloads
All versions This version
Views 209224
Downloads 33
Data volume 58.6 MB58.6 MB
Unique views 183191
Unique downloads 33
More info on how stats are collected.
Publication date:
May 8, 2023
DOI:
10.14278/rodare.2293

RODARE DOI Badge

DOI 

10.14278/rodare.2293

Markdown 

[![DOI](https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg)](https://doi.org/10.14278/rodare.2293)

reStructedText 

.. image:: https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg
   :target: https://doi.org/10.14278/rodare.2293

HTML 

<a href="https://doi.org/10.14278/rodare.2293"><img src="https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg" alt="DOI"></a>

Image URL 

https://rodare.hzdr.de/badge/DOI/10.14278/rodare.2293.svg

Target URL 

https://doi.org/10.14278/rodare.2293

Keyword(s):
Magnetic shape memory alloys Silicon microtechnology Ni2MnGa NiTi Epitaxial film growth
Related identifiers:
Identical to:
https://www.hzdr.de/publications/Publ-36937
Referenced by:
https://www.hzdr.de/publications/Publ-37186
Communities:
License (for files):
Creative Commons Attribution 4.0 International

Versions

Version 1 10.14278/rodare.2293 May 8, 2023
Cite all versions? You can cite all versions by using the DOI 10.14278/rodare.2292. This DOI represents all versions, and will always resolve to the latest one. Read more.

Share

Cite as

Export