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Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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@misc{fink_lukas_2023_2293,
  author       = {Fink, Lukas and
                  Kar, Satyakam and
                  Lünser, Klara and
                  Nielsch, Kornelius and
                  Reith, Heiko and
                  Fähler, Sebastian},
  title        = {{Data publication: Integration of Multifunctional 
                   Epitaxial (Magnetic) Shape Memory Films in Silicon
                   Microtechnology}},
  month        = may,
  year         = 2023,
  doi          = {10.14278/rodare.2293},
  url          = {https://doi.org/10.14278/rodare.2293}
}
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Publication date:
May 8, 2023
DOI:
10.14278/rodare.2293

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10.14278/rodare.2293

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Keyword(s):
Magnetic shape memory alloys, Silicon microtechnology, Ni2MnGa, NiTi, Epitaxial film growth
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https://www.hzdr.de/publications/Publ-36937
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Creative Commons Attribution 4.0 International

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Version 1 10.14278/rodare.2293 May 8, 2023
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