May 8, 2023 Dataset Open Access

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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  "description": "<p>Measured raw data (XRD, texture, SEM, PPMS and EDX)</p>", 
  "@type": "Dataset", 
  "keywords": [
    "Magnetic shape memory alloys", 
    "Silicon microtechnology", 
    "Ni2MnGa", 
    "NiTi", 
    "Epitaxial film growth"
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  "identifier": "https://doi.org/10.14278/rodare.2293", 
  "datePublished": "2023-05-08", 
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  "name": "Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology", 
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  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "creator": [
    {
      "name": "Fink, Lukas", 
      "@id": "https://orcid.org/0000-0002-3118-6114", 
      "affiliation": "1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstra\u00dfe 400, 01328 Dresden, Germany", 
      "@type": "Person"
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    {
      "name": "Kar, Satyakam", 
      "@id": "https://orcid.org/0000-0003-1352-8026", 
      "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany", 
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      "name": "L\u00fcnser, Klara", 
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    {
      "name": "Nielsch, Kornelius", 
      "@id": "https://orcid.org/0000-0003-2271-7726", 
      "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany", 
      "@type": "Person"
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    {
      "name": "Reith, Heiko", 
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      "name": "F\u00e4hler, Sebastian", 
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