May 8, 2023 Dataset Open Access

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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  "name": "Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology", 
  "keywords": [
    "Magnetic shape memory alloys", 
    "Silicon microtechnology", 
    "Ni2MnGa", 
    "NiTi", 
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  "datePublished": "2023-05-08", 
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      "affiliation": "1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstra\u00dfe 400, 01328 Dresden, Germany"
    }, 
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      "name": "Kar, Satyakam", 
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      "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany"
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      "affiliation": "1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstra\u00dfe 400, 01328 Dresden, Germany"
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      "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany"
    }, 
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      "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany"
    }, 
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