May 8, 2023 Dataset Open Access

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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  "name": "Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology", 
  "description": "<p>Measured raw data (XRD, texture, SEM, PPMS and EDX)</p>", 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
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  "keywords": [
    "Magnetic shape memory alloys, Silicon microtechnology, Ni2MnGa, NiTi, Epitaxial film growth"
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  "identifier": "https://doi.org/10.14278/rodare.2293", 
  "datePublished": "2023-05-08", 
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      "name": "Fink, Lukas", 
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      "name": "Kar, Satyakam", 
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    {
      "name": "Reith, Heiko", 
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      "affiliation": "1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstra\u00dfe 400, 01328 Dresden, Germany", 
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