Dataset Open Access

Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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{
  "publisher": "Rodare", 
  "DOI": "10.14278/rodare.2293", 
  "language": "eng", 
  "type": "dataset", 
  "author": [
    {
      "family": "Fink, Lukas"
    }, 
    {
      "family": "Kar, Satyakam"
    }, 
    {
      "family": "L\u00fcnser, Klara"
    }, 
    {
      "family": "Nielsch, Kornelius"
    }, 
    {
      "family": "Reith, Heiko"
    }, 
    {
      "family": "F\u00e4hler, Sebastian"
    }
  ], 
  "issued": {
    "date-parts": [
      [
        2023, 
        5, 
        8
      ]
    ]
  }, 
  "abstract": "<p>Measured raw data (XRD, texture, SEM, PPMS and EDX)</p>", 
  "title": "Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology", 
  "id": "2293"
}
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Publication date:
May 8, 2023
DOI:
10.14278/rodare.2293

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10.14278/rodare.2293

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Keyword(s):
Magnetic shape memory alloys, Silicon microtechnology, Ni2MnGa, NiTi, Epitaxial film growth
Related identifiers:
Identical to:
https://www.hzdr.de/publications/Publ-36937
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License (for files):
Creative Commons Attribution 4.0 International

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Version 1 10.14278/rodare.2293 May 8, 2023
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