May 8, 2023 Dataset Open Access

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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  <identifier identifierType="DOI">10.14278/rodare.2293</identifier>
  <creators>
    <creator>
      <creatorName>Fink, Lukas</creatorName>
      <givenName>Lukas</givenName>
      <familyName>Fink</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-3118-6114</nameIdentifier>
      <affiliation>1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</affiliation>
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    <creator>
      <creatorName>Kar, Satyakam</creatorName>
      <givenName>Satyakam</givenName>
      <familyName>Kar</familyName>
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      <affiliation>Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstraße 20, 01069 Dresden, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Lünser, Klara</creatorName>
      <givenName>Klara</givenName>
      <familyName>Lünser</familyName>
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      <affiliation>1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Nielsch, Kornelius</creatorName>
      <givenName>Kornelius</givenName>
      <familyName>Nielsch</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0003-2271-7726</nameIdentifier>
      <affiliation>Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstraße 20, 01069 Dresden, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Reith, Heiko</creatorName>
      <givenName>Heiko</givenName>
      <familyName>Reith</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0003-1662-3774</nameIdentifier>
      <affiliation>Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstraße 20, 01069 Dresden, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Fähler, Sebastian</creatorName>
      <givenName>Sebastian</givenName>
      <familyName>Fähler</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-9450-4952</nameIdentifier>
      <affiliation>1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany</affiliation>
    </creator>
  </creators>
  <titles>
    <title>Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2023</publicationYear>
  <subjects>
    <subject>Magnetic shape memory alloys</subject>
    <subject>Silicon microtechnology</subject>
    <subject>Ni2MnGa</subject>
    <subject>NiTi</subject>
    <subject>Epitaxial film growth</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2023-05-08</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="Dataset"/>
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  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Measured raw data (XRD, texture, SEM, PPMS and EDX)&lt;/p&gt;</description>
  </descriptions>
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