May 8, 2023 Dataset Open Access

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian

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        "orcid": "0000-0002-3118-6114"
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        "orcid": "0000-0003-3309-7948"
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        "name": "Nielsch, Kornelius", 
        "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany", 
        "orcid": "0000-0003-2271-7726"
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      {
        "name": "Reith, Heiko", 
        "affiliation": "Leibniz IFW Dresden, Institute for Metallic Materials, Helmholtzstra\u00dfe 20, 01069 Dresden, Germany", 
        "orcid": "0000-0003-1662-3774"
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        "orcid": "0000-0001-9450-4952"
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    "title": "Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology", 
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