Dataset Open Access

Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology

Fink, Lukas; Kar, Satyakam; Lünser, Klara; Nielsch, Kornelius; Reith, Heiko; Fähler, Sebastian


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  <dc:creator>Fink, Lukas</dc:creator>
  <dc:creator>Kar, Satyakam</dc:creator>
  <dc:creator>Lünser, Klara</dc:creator>
  <dc:creator>Nielsch, Kornelius</dc:creator>
  <dc:creator>Reith, Heiko</dc:creator>
  <dc:creator>Fähler, Sebastian</dc:creator>
  <dc:date>2023-05-08</dc:date>
  <dc:description>Measured raw data (XRD, texture, SEM, PPMS and EDX)</dc:description>
  <dc:identifier>https://rodare.hzdr.de/record/2293</dc:identifier>
  <dc:identifier>10.14278/rodare.2293</dc:identifier>
  <dc:identifier>oai:rodare.hzdr.de:2293</dc:identifier>
  <dc:language>eng</dc:language>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-36937</dc:relation>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-37186</dc:relation>
  <dc:relation>doi:10.14278/rodare.2292</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/fwi</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/hzdr</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/matter</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/rodare</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:subject>Magnetic shape memory alloys</dc:subject>
  <dc:subject>Silicon microtechnology</dc:subject>
  <dc:subject>Ni2MnGa</dc:subject>
  <dc:subject>NiTi</dc:subject>
  <dc:subject>Epitaxial film growth</dc:subject>
  <dc:title>Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology</dc:title>
  <dc:type>info:eu-repo/semantics/other</dc:type>
  <dc:type>dataset</dc:type>
</oai_dc:dc>
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