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Fabrication of highly n-type-doped germanium nanowires and Ohmic contacts using ion implantation and flash lamp annealing

Echresh, Ahmad; Prucnal, Slawomir; Li, Zichao; Hübner, René; Ganss, Fabian; Steuer, Oliver; Bärwolf, Florian; Jazavandi Ghamsari, Shima; Helm, Manfred; Zhou, Shengqiang; Erbe, Artur; Rebohle, Lars; Georgiev, Yordan

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@misc{echresh_ahmad_2022_1824,
  author       = {Echresh, Ahmad and
                  Prucnal, Slawomir and
                  Li, Zichao and
                  Hübner, René and
                  Ganss, Fabian and
                  Steuer, Oliver and
                  Bärwolf, Florian and
                  Jazavandi Ghamsari, Shima and
                  Helm, Manfred and
                  Zhou, Shengqiang and
                  Erbe, Artur and
                  Rebohle, Lars and
                  Georgiev, Yordan},
  title        = {{Fabrication of highly n-type-doped germanium 
                   nanowires and Ohmic contacts using ion
                   implantation and flash lamp annealing}},
  month        = aug,
  year         = 2022,
  doi          = {10.14278/rodare.1824},
  url          = {https://doi.org/10.14278/rodare.1824}
}
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Publication date:
August 3, 2022
DOI:
10.14278/rodare.1824

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Version 1 10.14278/rodare.1824 Aug 3, 2022
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