Dataset Open Access
Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications
von Borany, Johannes;
Engelmann, Hans-Jürgen;
Heinig, Karl-Heinz;
Hlawacek, Gregor;
Hübner, René;
Klüpfel, Fabian;
Möller, Wolfhard;
Pourteau, Marie-Line;
Rademaker, Guido;
Rommel, Mathias;
Baier, Leander;
Pichler, Peter;
Tiron, Raluca
The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.
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- Publication date:
- July 11, 2022
- DOI:
-
- Keyword(s):
- CMOS Single-electron transistor nanostructure fabrication self-organization Silicon nanodot Nanopillars Ion-beam mixing Phase separation
- Related identifiers:
- Cites:
10.17815/jlsrf-3-159 - Identical to:
https://www.hzdr.de/publications/Publ-34906 - Referenced by:
10.1088/1361-6641/acbe5d, https://www.hzdr.de/publications/Publ-34842 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International