Dataset Open Access

Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

MARC21 XML Export

<?xml version='1.0' encoding='UTF-8'?>
<record xmlns="http://www.loc.gov/MARC21/slim">
  <leader>00000nmm##2200000uu#4500</leader>
  <datafield tag="024" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.1805</subfield>
    <subfield code="2">doi</subfield>
  </datafield>
  <datafield tag="542" ind1=" " ind2=" ">
    <subfield code="l">open</subfield>
  </datafield>
  <datafield tag="245" ind1=" " ind2=" ">
    <subfield code="a">Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications</subfield>
  </datafield>
  <datafield tag="650" ind1="1" ind2="7">
    <subfield code="a">cc-by</subfield>
    <subfield code="2">opendefinition.org</subfield>
  </datafield>
  <datafield tag="909" ind1="C" ind2="O">
    <subfield code="o">oai:rodare.hzdr.de:1805</subfield>
    <subfield code="p">openaire_data</subfield>
    <subfield code="p">user-rodare</subfield>
    <subfield code="p">user-fwi</subfield>
    <subfield code="p">user-ibc</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-fwi</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-ibc</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-rodare</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">CMOS</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Single-electron transistor</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">nanostructure fabrication</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">self-organization</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Silicon nanodot</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Nanopillars</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Ion-beam mixing</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Phase separation</subfield>
  </datafield>
  <datafield tag="520" ind1=" " ind2=" ">
    <subfield code="a">&lt;p&gt;The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.&lt;/p&gt;</subfield>
  </datafield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="a">von Borany, Johannes</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Engelmann, Hans-Jürgen</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Heinig, Karl-Heinz</subfield>
    <subfield code="0">(orcid)0000-0002-0457-1164</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Hlawacek, Gregor</subfield>
    <subfield code="0">(orcid)0000-0001-7192-716X</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Hübner, René</subfield>
    <subfield code="0">(orcid)0000-0002-5200-6928</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Klüpfel, Fabian</subfield>
    <subfield code="u">Fraunhofer IISB Erlangen</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Möller, Wolfhard</subfield>
    <subfield code="0">(orcid)0000-0002-9068-8384</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Pourteau, Marie-Line</subfield>
    <subfield code="u">CEA-LETI Grenoble</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Rademaker, Guido</subfield>
    <subfield code="u">CEA-LETI Grenoble</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Rommel, Mathias</subfield>
    <subfield code="u">Fraunhofer IISB Erlangen</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Baier, Leander</subfield>
    <subfield code="u">Fraunhofer IISB Erlangen</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Pichler, Peter</subfield>
    <subfield code="u">Fraunhofer IISB Erlangen</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Tiron, Raluca</subfield>
    <subfield code="u">CEA-LETI Grenoble</subfield>
  </datafield>
  <datafield tag="540" ind1=" " ind2=" ">
    <subfield code="u">https://creativecommons.org/licenses/by/4.0/legalcode</subfield>
    <subfield code="a">Creative Commons Attribution 4.0 International</subfield>
  </datafield>
  <controlfield tag="001">1805</controlfield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="c">2022-07-11</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">dataset</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.17815/jlsrf-3-159</subfield>
    <subfield code="i">cites</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.1088/1361-6641/acbe5d</subfield>
    <subfield code="i">isReferencedBy</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-34906</subfield>
    <subfield code="i">isIdenticalTo</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-34842</subfield>
    <subfield code="i">isReferencedBy</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.1804</subfield>
    <subfield code="i">isVersionOf</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <controlfield tag="005">20240812132252.0</controlfield>
  <datafield tag="856" ind1="4" ind2=" ">
    <subfield code="s">219744</subfield>
    <subfield code="u">https://rodare.hzdr.de/record/1805/files/Data-Repository_Overview.pdf</subfield>
    <subfield code="z">md5:fa267b89f916c58dbf58182f0d76179a</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2=" ">
    <subfield code="s">12699751</subfield>
    <subfield code="u">https://rodare.hzdr.de/record/1805/files/Data Repository.zip</subfield>
    <subfield code="z">md5:3df6ec2c0f473f9366101225b082e054</subfield>
  </datafield>
</record>
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Publication date:
July 11, 2022
DOI:
10.14278/rodare.1805

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10.14278/rodare.1805

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Keyword(s):
CMOS Single-electron transistor nanostructure fabrication self-organization Silicon nanodot Nanopillars Ion-beam mixing Phase separation
Related identifiers:
Cites:
10.17815/jlsrf-3-159
Identical to:
https://www.hzdr.de/publications/Publ-34906
Referenced by:
10.1088/1361-6641/acbe5d, https://www.hzdr.de/publications/Publ-34842
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