July 11, 2022 Dataset Open Access

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

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{
  "DOI": "10.14278/rodare.1805", 
  "issued": {
    "date-parts": [
      [
        2022, 
        7, 
        11
      ]
    ]
  }, 
  "abstract": "<p>The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.</p>", 
  "id": "1805", 
  "author": [
    {
      "family": "von Borany, Johannes"
    }, 
    {
      "family": "Engelmann, Hans-J\u00fcrgen"
    }, 
    {
      "family": "Heinig, Karl-Heinz"
    }, 
    {
      "family": "Hlawacek, Gregor"
    }, 
    {
      "family": "H\u00fcbner, Ren\u00e9"
    }, 
    {
      "family": "Kl\u00fcpfel, Fabian"
    }, 
    {
      "family": "M\u00f6ller, Wolfhard"
    }, 
    {
      "family": "Pourteau, Marie-Line"
    }, 
    {
      "family": "Rademaker, Guido"
    }, 
    {
      "family": "Rommel, Mathias"
    }, 
    {
      "family": "Baier, Leander"
    }, 
    {
      "family": "Pichler, Peter"
    }, 
    {
      "family": "Tiron, Raluca"
    }
  ], 
  "publisher": "Rodare", 
  "type": "dataset", 
  "title": "Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications"
}