Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

doi:10.14278/rodare.1805

July 11, 2022 Dataset Open Access

Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

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<?xml version='1.0' encoding='utf-8'?>
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:adms="http://www.w3.org/ns/adms#" xmlns:cnt="http://www.w3.org/2011/content#" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dct="http://purl.org/dc/terms/" xmlns:dctype="http://purl.org/dc/dcmitype/" xmlns:dcat="http://www.w3.org/ns/dcat#" xmlns:duv="http://www.w3.org/ns/duv#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:frapo="http://purl.org/cerif/frapo/" xmlns:geo="http://www.w3.org/2003/01/geo/wgs84_pos#" xmlns:gsp="http://www.opengis.net/ont/geosparql#" xmlns:locn="http://www.w3.org/ns/locn#" xmlns:org="http://www.w3.org/ns/org#" xmlns:owl="http://www.w3.org/2002/07/owl#" xmlns:prov="http://www.w3.org/ns/prov#" xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#" xmlns:schema="http://schema.org/" xmlns:skos="http://www.w3.org/2004/02/skos/core#" xmlns:vcard="http://www.w3.org/2006/vcard/ns#" xmlns:wdrs="http://www.w3.org/2007/05/powder-s#">
  <rdf:Description rdf:about="https://doi.org/10.14278/rodare.1805">
    <rdf:type rdf:resource="http://www.w3.org/ns/dcat#Dataset"/>
    <dct:type rdf:resource="http://purl.org/dc/dcmitype/Dataset"/>
    <dct:identifier rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://doi.org/10.14278/rodare.1805</dct:identifier>
    <foaf:page rdf:resource="https://doi.org/10.14278/rodare.1805"/>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>von Borany, Johannes</foaf:name>
        <foaf:givenName>Johannes</foaf:givenName>
        <foaf:familyName>von Borany</foaf:familyName>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Engelmann, Hans-Jürgen</foaf:name>
        <foaf:givenName>Hans-Jürgen</foaf:givenName>
        <foaf:familyName>Engelmann</foaf:familyName>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Heinig, Karl-Heinz</foaf:name>
        <foaf:givenName>Karl-Heinz</foaf:givenName>
        <foaf:familyName>Heinig</foaf:familyName>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0001-7192-716X">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Hlawacek, Gregor</foaf:name>
        <foaf:givenName>Gregor</foaf:givenName>
        <foaf:familyName>Hlawacek</foaf:familyName>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description rdf:about="http://orcid.org/0000-0002-5200-6928">
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Hübner, René</foaf:name>
        <foaf:givenName>René</foaf:givenName>
        <foaf:familyName>Hübner</foaf:familyName>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Klüpfel, Fabian</foaf:name>
        <foaf:givenName>Fabian</foaf:givenName>
        <foaf:familyName>Klüpfel</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Fraunhofer IISB Erlangen</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Möller, Wolfhard</foaf:name>
        <foaf:givenName>Wolfhard</foaf:givenName>
        <foaf:familyName>Möller</foaf:familyName>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Pourteau, Marie-Line</foaf:name>
        <foaf:givenName>Marie-Line</foaf:givenName>
        <foaf:familyName>Pourteau</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>CEA-LETI Grenoble</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Rademaker, Guido</foaf:name>
        <foaf:givenName>Guido</foaf:givenName>
        <foaf:familyName>Rademaker</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>CEA-LETI Grenoble</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Rommel, Mathias</foaf:name>
        <foaf:givenName>Mathias</foaf:givenName>
        <foaf:familyName>Rommel</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Fraunhofer IISB Erlangen</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Baier, Leander</foaf:name>
        <foaf:givenName>Leander</foaf:givenName>
        <foaf:familyName>Baier</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Fraunhofer IISB Erlangen</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Pichler, Peter</foaf:name>
        <foaf:givenName>Peter</foaf:givenName>
        <foaf:familyName>Pichler</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Fraunhofer IISB Erlangen</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Tiron, Raluca</foaf:name>
        <foaf:givenName>Raluca</foaf:givenName>
        <foaf:familyName>Tiron</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>CEA-LETI Grenoble</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:title>Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications</dct:title>
    <dct:publisher>
      <foaf:Agent>
        <foaf:name>Rodare</foaf:name>
      </foaf:Agent>
    </dct:publisher>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#gYear">2022</dct:issued>
    <dcat:keyword>CMOS</dcat:keyword>
    <dcat:keyword>Single-electron transistor</dcat:keyword>
    <dcat:keyword>nanostructure fabrication</dcat:keyword>
    <dcat:keyword>self-organization</dcat:keyword>
    <dcat:keyword>Silicon nanodot</dcat:keyword>
    <dcat:keyword>Nanopillars</dcat:keyword>
    <dcat:keyword>Ion-beam mixing</dcat:keyword>
    <dcat:keyword>Phase separation</dcat:keyword>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2022-07-11</dct:issued>
    <owl:sameAs rdf:resource="https://rodare.hzdr.de/record/1805"/>
    <adms:identifier>
      <adms:Identifier>
        <skos:notation rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://rodare.hzdr.de/record/1805</skos:notation>
      </adms:Identifier>
    </adms:identifier>
    <dct:relation rdf:resource="https://doi.org/10.17815/jlsrf-3-159"/>
    <dct:isReferencedBy rdf:resource="https://www.hzdr.de/publications/Publ-34842"/>
    <owl:sameAs rdf:resource="https://www.hzdr.de/publications/Publ-34906"/>
    <dct:isVersionOf rdf:resource="https://doi.org/10.14278/rodare.1804"/>
    <dct:isPartOf rdf:resource="https://rodare.hzdr.de/communities/rodare"/>
    <dct:description>&lt;p&gt;The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.&lt;/p&gt;</dct:description>
    <dct:accessRights rdf:resource="http://publications.europa.eu/resource/authority/access-right/PUBLIC"/>
    <dct:accessRights>
      <dct:RightsStatement rdf:about="info:eu-repo/semantics/openAccess">
        <rdfs:label>Open Access</rdfs:label>
      </dct:RightsStatement>
    </dct:accessRights>
    <dcat:distribution>
      <dcat:Distribution>
        <dct:rights>
          <dct:RightsStatement rdf:about="https://creativecommons.org/licenses/by/4.0/legalcode">
            <rdfs:label>Creative Commons Attribution 4.0 International</rdfs:label>
          </dct:RightsStatement>
        </dct:rights>
        <dcat:accessURL rdf:resource="https://doi.org/10.14278/rodare.1805"/>
      </dcat:Distribution>
    </dcat:distribution>
  </rdf:Description>
</rdf:RDF>

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Publication date:

July 11, 2022

DOI:

Keyword(s):

CMOS Single-electron transistor nanostructure fabrication self-organization Silicon nanodot Nanopillars Ion-beam mixing Phase separation

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Cites:
10.17815/jlsrf-3-159

Identical to:
https://www.hzdr.de/publications/Publ-34906

Referenced by:
https://www.hzdr.de/publications/Publ-34842

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RODARE

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Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

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Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

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