Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

doi:10.14278/rodare.1805

July 11, 2022 Dataset Open Access

Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

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Publication date:

July 11, 2022

DOI:

Keyword(s):

CMOS Single-electron transistor nanostructure fabrication self-organization Silicon nanodot Nanopillars Ion-beam mixing Phase separation

Related identifiers:

Cites:
10.17815/jlsrf-3-159

Identical to:
https://www.hzdr.de/publications/Publ-34906

Referenced by:
10.1088/1361-6641/acbe5d, https://www.hzdr.de/publications/Publ-34842

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Creative Commons Attribution 4.0 International

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von Borany, Johannes, Engelmann, Hans-Jürgen, Heinig, Karl-Heinz, Hlawacek, Gregor, Hübner, René, Klüpfel, Fabian, … Tiron, Raluca. (2022). Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications [Data set]. Rodare. http://doi.org/10.14278/rodare.1805

Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

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Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

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