July 11, 2022 Dataset Open Access

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

DataCite XML Export

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  <identifier identifierType="DOI">10.14278/rodare.1805</identifier>
  <creators>
    <creator>
      <creatorName>von Borany, Johannes</creatorName>
      <givenName>Johannes</givenName>
      <familyName>von Borany</familyName>
    </creator>
    <creator>
      <creatorName>Engelmann, Hans-Jürgen</creatorName>
      <givenName>Hans-Jürgen</givenName>
      <familyName>Engelmann</familyName>
    </creator>
    <creator>
      <creatorName>Heinig, Karl-Heinz</creatorName>
      <givenName>Karl-Heinz</givenName>
      <familyName>Heinig</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-0457-1164</nameIdentifier>
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    <creator>
      <creatorName>Hlawacek, Gregor</creatorName>
      <givenName>Gregor</givenName>
      <familyName>Hlawacek</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-7192-716X</nameIdentifier>
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    <creator>
      <creatorName>Hübner, René</creatorName>
      <givenName>René</givenName>
      <familyName>Hübner</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-5200-6928</nameIdentifier>
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    <creator>
      <creatorName>Klüpfel, Fabian</creatorName>
      <givenName>Fabian</givenName>
      <familyName>Klüpfel</familyName>
      <affiliation>Fraunhofer IISB Erlangen</affiliation>
    </creator>
    <creator>
      <creatorName>Möller, Wolfhard</creatorName>
      <givenName>Wolfhard</givenName>
      <familyName>Möller</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-9068-8384</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Pourteau, Marie-Line</creatorName>
      <givenName>Marie-Line</givenName>
      <familyName>Pourteau</familyName>
      <affiliation>CEA-LETI Grenoble</affiliation>
    </creator>
    <creator>
      <creatorName>Rademaker, Guido</creatorName>
      <givenName>Guido</givenName>
      <familyName>Rademaker</familyName>
      <affiliation>CEA-LETI Grenoble</affiliation>
    </creator>
    <creator>
      <creatorName>Rommel, Mathias</creatorName>
      <givenName>Mathias</givenName>
      <familyName>Rommel</familyName>
      <affiliation>Fraunhofer IISB Erlangen</affiliation>
    </creator>
    <creator>
      <creatorName>Baier, Leander</creatorName>
      <givenName>Leander</givenName>
      <familyName>Baier</familyName>
      <affiliation>Fraunhofer IISB Erlangen</affiliation>
    </creator>
    <creator>
      <creatorName>Pichler, Peter</creatorName>
      <givenName>Peter</givenName>
      <familyName>Pichler</familyName>
      <affiliation>Fraunhofer IISB Erlangen</affiliation>
    </creator>
    <creator>
      <creatorName>Tiron, Raluca</creatorName>
      <givenName>Raluca</givenName>
      <familyName>Tiron</familyName>
      <affiliation>CEA-LETI Grenoble</affiliation>
    </creator>
  </creators>
  <titles>
    <title>Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2022</publicationYear>
  <subjects>
    <subject>CMOS</subject>
    <subject>Single-electron transistor</subject>
    <subject>nanostructure fabrication</subject>
    <subject>self-organization</subject>
    <subject>Silicon nanodot</subject>
    <subject>Nanopillars</subject>
    <subject>Ion-beam mixing</subject>
    <subject>Phase separation</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2022-07-11</date>
  </dates>
  <resourceType resourceTypeGeneral="Dataset"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/1805</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="Cites">10.17815/jlsrf-3-159</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsReferencedBy">10.1088/1361-6641/acbe5d</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-34906</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-34842</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.1804</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/fwi</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ibc</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.&lt;/p&gt;</description>
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