Dataset Open Access
von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca
<?xml version='1.0' encoding='utf-8'?> <resource xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://datacite.org/schema/kernel-4" xsi:schemaLocation="http://datacite.org/schema/kernel-4 http://schema.datacite.org/meta/kernel-4.1/metadata.xsd"> <identifier identifierType="DOI">10.14278/rodare.1805</identifier> <creators> <creator> <creatorName>von Borany, Johannes</creatorName> <givenName>Johannes</givenName> <familyName>von Borany</familyName> </creator> <creator> <creatorName>Engelmann, Hans-Jürgen</creatorName> <givenName>Hans-Jürgen</givenName> <familyName>Engelmann</familyName> </creator> <creator> <creatorName>Heinig, Karl-Heinz</creatorName> <givenName>Karl-Heinz</givenName> <familyName>Heinig</familyName> </creator> <creator> <creatorName>Hlawacek, Gregor</creatorName> <givenName>Gregor</givenName> <familyName>Hlawacek</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-7192-716X</nameIdentifier> </creator> <creator> <creatorName>Hübner, René</creatorName> <givenName>René</givenName> <familyName>Hübner</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-5200-6928</nameIdentifier> </creator> <creator> <creatorName>Klüpfel, Fabian</creatorName> <givenName>Fabian</givenName> <familyName>Klüpfel</familyName> <affiliation>Fraunhofer IISB Erlangen</affiliation> </creator> <creator> <creatorName>Möller, Wolfhard</creatorName> <givenName>Wolfhard</givenName> <familyName>Möller</familyName> </creator> <creator> <creatorName>Pourteau, Marie-Line</creatorName> <givenName>Marie-Line</givenName> <familyName>Pourteau</familyName> <affiliation>CEA-LETI Grenoble</affiliation> </creator> <creator> <creatorName>Rademaker, Guido</creatorName> <givenName>Guido</givenName> <familyName>Rademaker</familyName> <affiliation>CEA-LETI Grenoble</affiliation> </creator> <creator> <creatorName>Rommel, Mathias</creatorName> <givenName>Mathias</givenName> <familyName>Rommel</familyName> <affiliation>Fraunhofer IISB Erlangen</affiliation> </creator> <creator> <creatorName>Baier, Leander</creatorName> <givenName>Leander</givenName> <familyName>Baier</familyName> <affiliation>Fraunhofer IISB Erlangen</affiliation> </creator> <creator> <creatorName>Pichler, Peter</creatorName> <givenName>Peter</givenName> <familyName>Pichler</familyName> <affiliation>Fraunhofer IISB Erlangen</affiliation> </creator> <creator> <creatorName>Tiron, Raluca</creatorName> <givenName>Raluca</givenName> <familyName>Tiron</familyName> <affiliation>CEA-LETI Grenoble</affiliation> </creator> </creators> <titles> <title>Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications</title> </titles> <publisher>Rodare</publisher> <publicationYear>2022</publicationYear> <subjects> <subject>CMOS</subject> <subject>Single-electron transistor</subject> <subject>nanostructure fabrication</subject> <subject>self-organization</subject> <subject>Silicon nanodot</subject> <subject>Nanopillars</subject> <subject>Ion-beam mixing</subject> <subject>Phase separation</subject> </subjects> <dates> <date dateType="Issued">2022-07-11</date> </dates> <resourceType resourceTypeGeneral="Dataset"/> <alternateIdentifiers> <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/1805</alternateIdentifier> </alternateIdentifiers> <relatedIdentifiers> <relatedIdentifier relatedIdentifierType="DOI" relationType="Cites">10.17815/jlsrf-3-159</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-34842</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-34906</relatedIdentifier> <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.1804</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier> </relatedIdentifiers> <rightsList> <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights> <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights> </rightsList> <descriptions> <description descriptionType="Abstract"><p>The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.</p></description> </descriptions> </resource>
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