Dataset Open Access
Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications
von Borany, Johannes;
Engelmann, Hans-Jürgen;
Heinig, Karl-Heinz;
Hlawacek, Gregor;
Hübner, René;
Klüpfel, Fabian;
Möller, Wolfhard;
Pourteau, Marie-Line;
Rademaker, Guido;
Rommel, Mathias;
Baier, Leander;
Pichler, Peter;
Tiron, Raluca
BibTeX Export
@misc{von_borany_johannes_2022_1805,
author = {von Borany, Johannes and
Engelmann, Hans-Jürgen and
Heinig, Karl-Heinz and
Hlawacek, Gregor and
Hübner, René and
Klüpfel, Fabian and
Möller, Wolfhard and
Pourteau, Marie-Line and
Rademaker, Guido and
Rommel, Mathias and
Baier, Leander and
Pichler, Peter and
Tiron, Raluca},
title = {{Data publication: CMOS-compatible
manufacturability of sub-15 nm Si/SiO2/Si
nanopillars containing single Si nanodots for
single electron transistor applications}},
month = jul,
year = 2022,
doi = {10.14278/rodare.1805},
url = {https://doi.org/10.14278/rodare.1805}
}
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| Data volume | 239.0 MB | 239.0 MB |
| Unique views | 505 | 505 |
| Unique downloads | 116 | 116 |
- Publication date:
- July 11, 2022
- DOI:
-
- Keyword(s):
- CMOS Single-electron transistor nanostructure fabrication self-organization Silicon nanodot Nanopillars Ion-beam mixing Phase separation
- Related identifiers:
- Cites:
10.17815/jlsrf-3-159 - Identical to:
https://www.hzdr.de/publications/Publ-34906 - Referenced by:
10.1088/1361-6641/acbe5d, https://www.hzdr.de/publications/Publ-34842 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International