Dataset Open Access

Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

BibTeX Export

@misc{von_borany_johannes_2022_1805,
  author       = {von Borany, Johannes and
                  Engelmann, Hans-Jürgen and
                  Heinig, Karl-Heinz and
                  Hlawacek, Gregor and
                  Hübner, René and
                  Klüpfel, Fabian and
                  Möller, Wolfhard and
                  Pourteau, Marie-Line and
                  Rademaker, Guido and
                  Rommel, Mathias and
                  Baier, Leander and
                  Pichler, Peter and
                  Tiron, Raluca},
  title        = {{Data publication: CMOS-compatible 
                   manufacturability of sub-15 nm Si/SiO2/Si
                   nanopillars containing single Si nanodots for
                   single electron transistor applications}},
  month        = jul,
  year         = 2022,
  doi          = {10.14278/rodare.1805},
  url          = {https://doi.org/10.14278/rodare.1805}
}
38
11
views
downloads
All versions This version
Views 3838
Downloads 1111
Data volume 14.9 MB14.9 MB
Unique views 3232
Unique downloads 99
More info on how stats are collected.
Publication date:
July 11, 2022
DOI:
10.14278/rodare.1805

RODARE DOI Badge

DOI 

10.14278/rodare.1805

Markdown 

[![DOI](https://rodare.hzdr.de/badge/DOI/10.14278/rodare.1805.svg)](https://doi.org/10.14278/rodare.1805)

reStructedText 

.. image:: https://rodare.hzdr.de/badge/DOI/10.14278/rodare.1805.svg
   :target: https://doi.org/10.14278/rodare.1805

HTML 

<a href="https://doi.org/10.14278/rodare.1805"><img src="https://rodare.hzdr.de/badge/DOI/10.14278/rodare.1805.svg" alt="DOI"></a>

Image URL 

https://rodare.hzdr.de/badge/DOI/10.14278/rodare.1805.svg

Target URL 

https://doi.org/10.14278/rodare.1805

Keyword(s):
CMOS Single-electron transistor nanostructure fabrication self-organization Silicon nanodot Nanopillars Ion-beam mixing Phase separation
Related identifiers:
Cites:
10.17815/jlsrf-3-159
Identical to:
https://www.hzdr.de/publications/Publ-34906
Referenced by:
https://www.hzdr.de/publications/Publ-34842
Communities:
License (for files):
Creative Commons Attribution 4.0 International

Versions

Version 1 10.14278/rodare.1805 Jul 11, 2022
Cite all versions? You can cite all versions by using the DOI 10.14278/rodare.1804. This DOI represents all versions, and will always resolve to the latest one. Read more.

Share

Cite as

Export