July 11, 2022 Dataset Open Access

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

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  "url": "https://rodare.hzdr.de/record/1805", 
  "@id": "https://doi.org/10.14278/rodare.1805", 
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  "datePublished": "2022-07-11", 
  "identifier": "https://doi.org/10.14278/rodare.1805", 
  "citation": [
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      "@type": "CreativeWork", 
      "@id": "https://doi.org/10.17815/jlsrf-3-159"
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  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
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  "@type": "Dataset", 
  "creator": [
    {
      "name": "von Borany, Johannes", 
      "@type": "Person"
    }, 
    {
      "name": "Engelmann, Hans-J\u00fcrgen", 
      "@type": "Person"
    }, 
    {
      "name": "Heinig, Karl-Heinz", 
      "@id": "https://orcid.org/0000-0002-0457-1164", 
      "@type": "Person"
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    {
      "name": "Hlawacek, Gregor", 
      "@id": "https://orcid.org/0000-0001-7192-716X", 
      "@type": "Person"
    }, 
    {
      "name": "H\u00fcbner, Ren\u00e9", 
      "@id": "https://orcid.org/0000-0002-5200-6928", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Kl\u00fcpfel, Fabian", 
      "@type": "Person"
    }, 
    {
      "name": "M\u00f6ller, Wolfhard", 
      "@id": "https://orcid.org/0000-0002-9068-8384", 
      "@type": "Person"
    }, 
    {
      "affiliation": "CEA-LETI Grenoble", 
      "name": "Pourteau, Marie-Line", 
      "@type": "Person"
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    {
      "affiliation": "CEA-LETI Grenoble", 
      "name": "Rademaker, Guido", 
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    {
      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Rommel, Mathias", 
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      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Baier, Leander", 
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      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Pichler, Peter", 
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    {
      "affiliation": "CEA-LETI Grenoble", 
      "name": "Tiron, Raluca", 
      "@type": "Person"
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  "description": "<p>The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.</p>", 
  "name": "Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications", 
  "keywords": [
    "CMOS", 
    "Single-electron transistor", 
    "nanostructure fabrication", 
    "self-organization", 
    "Silicon nanodot", 
    "Nanopillars", 
    "Ion-beam mixing", 
    "Phase separation"
  ]
}