July 11, 2022 Dataset Open Access

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

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{
  "identifier": "https://doi.org/10.14278/rodare.1805", 
  "description": "<p>The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.</p>", 
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      "name": "Heinig, Karl-Heinz"
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      "name": "Hlawacek, Gregor"
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      "@type": "Person", 
      "@id": "https://orcid.org/0000-0002-5200-6928", 
      "name": "H\u00fcbner, Ren\u00e9"
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    {
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      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Kl\u00fcpfel, Fabian"
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      "name": "M\u00f6ller, Wolfhard"
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      "affiliation": "CEA-LETI Grenoble", 
      "name": "Pourteau, Marie-Line"
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    {
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      "affiliation": "CEA-LETI Grenoble", 
      "name": "Rademaker, Guido"
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    {
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      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Rommel, Mathias"
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      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Baier, Leander"
    }, 
    {
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      "affiliation": "Fraunhofer IISB Erlangen", 
      "name": "Pichler, Peter"
    }, 
    {
      "@type": "Person", 
      "affiliation": "CEA-LETI Grenoble", 
      "name": "Tiron, Raluca"
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  "@id": "https://doi.org/10.14278/rodare.1805", 
  "distribution": [
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      "fileFormat": "pdf", 
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  "name": "Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications", 
  "datePublished": "2022-07-11", 
  "@type": "Dataset", 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
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  "url": "https://rodare.hzdr.de/record/1805", 
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  "keywords": [
    "CMOS", 
    "Single-electron transistor", 
    "nanostructure fabrication", 
    "self-organization", 
    "Silicon nanodot", 
    "Nanopillars", 
    "Ion-beam mixing", 
    "Phase separation"
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}