July 11, 2022 Dataset Open Access

von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Hlawacek, Gregor; Hübner, René; Klüpfel, Fabian; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca

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<oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
  <dc:creator>von Borany, Johannes</dc:creator>
  <dc:creator>Engelmann, Hans-Jürgen</dc:creator>
  <dc:creator>Heinig, Karl-Heinz</dc:creator>
  <dc:creator>Hlawacek, Gregor</dc:creator>
  <dc:creator>Hübner, René</dc:creator>
  <dc:creator>Klüpfel, Fabian</dc:creator>
  <dc:creator>Möller, Wolfhard</dc:creator>
  <dc:creator>Pourteau, Marie-Line</dc:creator>
  <dc:creator>Rademaker, Guido</dc:creator>
  <dc:creator>Rommel, Mathias</dc:creator>
  <dc:creator>Baier, Leander</dc:creator>
  <dc:creator>Pichler, Peter</dc:creator>
  <dc:creator>Tiron, Raluca</dc:creator>
  <dc:date>2022-07-11</dc:date>
  <dc:description>The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot formation) and micrographs taken by electron and ion microscopes.</dc:description>
  <dc:identifier>https://rodare.hzdr.de/record/1805</dc:identifier>
  <dc:identifier>10.14278/rodare.1805</dc:identifier>
  <dc:identifier>oai:rodare.hzdr.de:1805</dc:identifier>
  <dc:relation>doi:10.17815/jlsrf-3-159</dc:relation>
  <dc:relation>doi:10.1088/1361-6641/acbe5d</dc:relation>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-34906</dc:relation>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-34842</dc:relation>
  <dc:relation>doi:10.14278/rodare.1804</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/fwi</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/ibc</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/rodare</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:subject>CMOS</dc:subject>
  <dc:subject>Single-electron transistor</dc:subject>
  <dc:subject>nanostructure fabrication</dc:subject>
  <dc:subject>self-organization</dc:subject>
  <dc:subject>Silicon nanodot</dc:subject>
  <dc:subject>Nanopillars</dc:subject>
  <dc:subject>Ion-beam mixing</dc:subject>
  <dc:subject>Phase separation</dc:subject>
  <dc:title>Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications</dc:title>
  <dc:type>info:eu-repo/semantics/other</dc:type>
  <dc:type>dataset</dc:type>
</oai_dc:dc>