August 19, 2026 Dataset Open Access

Godoy Perez, Guillermo Fernando; Rebohle, Lars; Kentsch, Ulrich; Chang, Guo-En; Zhou, Shengqiang; Yu, Ing-Song; Fischer, Inga A.; Berkmann, Fritz; Berencen, Yonder

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  <identifier identifierType="DOI">10.14278/rodare.4962</identifier>
  <creators>
    <creator>
      <creatorName>Godoy Perez, Guillermo Fernando</creatorName>
      <givenName>Guillermo Fernando</givenName>
      <familyName>Godoy Perez</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0009-0005-9731-5336</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Rebohle, Lars</creatorName>
      <givenName>Lars</givenName>
      <familyName>Rebohle</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-8066-6392</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Kentsch, Ulrich</creatorName>
      <givenName>Ulrich</givenName>
      <familyName>Kentsch</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-5295-2554</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Chang, Guo-En</creatorName>
      <givenName>Guo-En</givenName>
      <familyName>Chang</familyName>
      <affiliation>National Yang Ming Chiao Tung University, Hsinchu City, Taiwan</affiliation>
    </creator>
    <creator>
      <creatorName>Zhou, Shengqiang</creatorName>
      <givenName>Shengqiang</givenName>
      <familyName>Zhou</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-4885-799X</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Yu, Ing-Song</creatorName>
      <givenName>Ing-Song</givenName>
      <familyName>Yu</familyName>
      <affiliation>National Dong Hwa University, Hualien 974301, Taiwan</affiliation>
    </creator>
    <creator>
      <creatorName>Fischer, Inga A.</creatorName>
      <givenName>Inga A.</givenName>
      <familyName>Fischer</familyName>
      <affiliation>BTU Cottbus-Senftenberg, Erich-Weinert-Str. 1, 03046 Cottbus, Germany.</affiliation>
    </creator>
    <creator>
      <creatorName>Berkmann, Fritz</creatorName>
      <givenName>Fritz</givenName>
      <familyName>Berkmann</familyName>
      <affiliation>BTU Cottbus-Senftenberg, Erich-Weinert-Str. 1, 03046 Cottbus, Germany.</affiliation>
    </creator>
    <creator>
      <creatorName>Berencen, Yonder</creatorName>
      <givenName>Yonder</givenName>
      <familyName>Berencen</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0003-3529-0207</nameIdentifier>
    </creator>
  </creators>
  <titles>
    <title>High-efficiency phosphorus activation in Ge0.95Sn0.05 enabled by ion implantation and flash lamp annealing with preserved alloy integrity</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2026</publicationYear>
  <subjects>
    <subject>GeSn alloys</subject>
    <subject>Ion implantation</subject>
    <subject>Flash lamp annealing</subject>
    <subject>Dopant activation</subject>
    <subject>Non-equilibrium doping</subject>
    <subject>Strain engineering</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2026-08-19</date>
  </dates>
  <resourceType resourceTypeGeneral="Dataset"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/4962</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="Cites">10.17815/jlsrf-3-159</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-43591</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.4961</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/fwi</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ibc</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Origin and excel files used for data processing and visualisation of the different characterisation techniques performed (Raman, RBS, XRD, Hall Effect) of the processed GeSn material.&lt;/p&gt;</description>
  </descriptions>
</resource>