February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

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    <subfield code="a">&lt;p&gt;In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope&lt;br&gt;
(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-&lt;br&gt;
nanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established&lt;br&gt;
versatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for&lt;br&gt;
unprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be&lt;br&gt;
performed without contamination of the sample as well as avoiding environmental changes between&lt;br&gt;
processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as&lt;br&gt;
the AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect&lt;br&gt;
way---but also allows for nanomechanical property mapping, as well as electrical and magnetic&lt;br&gt;
characterisation of the sample after focused ion beam materials modification with the HIM. The&lt;br&gt;
experimental setup is described and evaluated through a series of correlative experiments, demonstrating&lt;br&gt;
the feasibility of the integration.&lt;/p&gt;</subfield>
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