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HIM and AFM Data set from first AFM in the HIM test

Hlawacek, Gregor; Andany, Santiago

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Publication date:
February 4, 2020
DOI:
10.14278/rodare.250

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10.14278/rodare.250

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Keyword(s):
Helium Ion Microscopy Atomic Force Microscopy
Grants:
European Commission:
  • IONS4SET - Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology (688072)
Related identifiers:
Identical to:
https://www.hzdr.de/publications/Publ-30718
Referenced by:
https://www.hzdr.de/publications/Publ-30689
Communities:

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Version 1 10.14278/rodare.250 Feb 4, 2020
Cite all versions? You can cite all versions by using the DOI 10.14278/rodare.249. This DOI represents all versions, and will always resolve to the latest one. Read more.

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Hlawacek, Gregor, & Andany, Santiago. (2020). HIM and AFM Data set from first AFM in the HIM test [Data set]. Rodare. http://doi.org/10.14278/rodare.250
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