February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

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{
  "identifier": "https://doi.org/10.14278/rodare.250", 
  "name": "HIM and AFM Data set from first AFM in the HIM test", 
  "@context": "https://schema.org/", 
  "creator": [
    {
      "affiliation": "Helmholtz-Zentrum Dresden - Rossendorf", 
      "name": "Hlawacek, Gregor", 
      "@type": "Person", 
      "@id": "https://orcid.org/0000-0001-7192-716X"
    }, 
    {
      "affiliation": "EPFL", 
      "name": "Andany, Santiago", 
      "@type": "Person", 
      "@id": "https://orcid.org/0000-0003-2281-7612"
    }
  ], 
  "contributor": [
    {
      "affiliation": "GETec", 
      "name": "Hummel, Stefan", 
      "@type": "Person"
    }, 
    {
      "affiliation": "EPFL", 
      "name": "Fantner, Georg", 
      "@type": "Person"
    }
  ], 
  "sameAs": [
    "https://www.hzdr.de/publications/Publ-30718"
  ], 
  "description": "<p>In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br>\n(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br>\nnanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br>\nversatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br>\nunprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br>\nperformed without contamination of the sample as well as avoiding environmental changes between<br>\nprocessing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br>\nthe AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br>\nway---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br>\ncharacterisation of the sample after focused ion beam materials modification with the HIM. The<br>\nexperimental setup is described and evaluated through a series of correlative experiments, demonstrating<br>\nthe feasibility of the integration.</p>", 
  "@type": "Dataset", 
  "url": "https://rodare.hzdr.de/record/250", 
  "@id": "https://doi.org/10.14278/rodare.250", 
  "keywords": [
    "Helium Ion Microscopy", 
    "Atomic Force Microscopy"
  ], 
  "datePublished": "2020-02-04"
}