February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

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  <identifier identifierType="DOI">10.14278/rodare.250</identifier>
  <creators>
    <creator>
      <creatorName>Hlawacek, Gregor</creatorName>
      <givenName>Gregor</givenName>
      <familyName>Hlawacek</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-7192-716X</nameIdentifier>
      <affiliation>Helmholtz-Zentrum Dresden - Rossendorf</affiliation>
    </creator>
    <creator>
      <creatorName>Andany, Santiago</creatorName>
      <givenName>Santiago</givenName>
      <familyName>Andany</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0003-2281-7612</nameIdentifier>
      <affiliation>EPFL</affiliation>
    </creator>
  </creators>
  <titles>
    <title>HIM and AFM Data set from first AFM in the HIM test</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2020</publicationYear>
  <subjects>
    <subject>Helium Ion Microscopy</subject>
    <subject>Atomic Force Microscopy</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2020-02-04</date>
  </dates>
  <resourceType resourceTypeGeneral="Dataset"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/250</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-30718</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-30689</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.249</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ecfunded</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/fwi</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ibc</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="info:eu-repo/semantics/closedAccess">Closed Access</rights>
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  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope&lt;br&gt;
(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-&lt;br&gt;
nanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established&lt;br&gt;
versatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for&lt;br&gt;
unprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be&lt;br&gt;
performed without contamination of the sample as well as avoiding environmental changes between&lt;br&gt;
processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as&lt;br&gt;
the AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect&lt;br&gt;
way---but also allows for nanomechanical property mapping, as well as electrical and magnetic&lt;br&gt;
characterisation of the sample after focused ion beam materials modification with the HIM. The&lt;br&gt;
experimental setup is described and evaluated through a series of correlative experiments, demonstrating&lt;br&gt;
the feasibility of the integration.&lt;/p&gt;</description>
  </descriptions>
  <fundingReferences>
    <fundingReference>
      <funderName>European Commission</funderName>
      <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/501100000780</funderIdentifier>
      <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/688072/">688072</awardNumber>
      <awardTitle>Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology</awardTitle>
    </fundingReference>
  </fundingReferences>
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