February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

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{
  "abstract": "<p>In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br>\n(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br>\nnanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br>\nversatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br>\nunprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br>\nperformed without contamination of the sample as well as avoiding environmental changes between<br>\nprocessing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br>\nthe AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br>\nway---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br>\ncharacterisation of the sample after focused ion beam materials modification with the HIM. The<br>\nexperimental setup is described and evaluated through a series of correlative experiments, demonstrating<br>\nthe feasibility of the integration.</p>", 
  "id": "250", 
  "type": "dataset", 
  "publisher": "Rodare", 
  "DOI": "10.14278/rodare.250", 
  "issued": {
    "date-parts": [
      [
        2020, 
        2, 
        4
      ]
    ]
  }, 
  "title": "HIM and AFM Data set from first AFM in the HIM test", 
  "author": [
    {
      "family": "Hlawacek, Gregor"
    }, 
    {
      "family": "Andany, Santiago"
    }
  ]
}