February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

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    "description": "<p>In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br>\n(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br>\nnanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br>\nversatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br>\nunprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br>\nperformed without contamination of the sample as well as avoiding environmental changes between<br>\nprocessing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br>\nthe AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br>\nway---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br>\ncharacterisation of the sample after focused ion beam materials modification with the HIM. The<br>\nexperimental setup is described and evaluated through a series of correlative experiments, demonstrating<br>\nthe feasibility of the integration.</p>", 
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