February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

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        "code": "688072", 
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          "self": "https://rodare.hzdr.de/api/grants/10.13039/501100000780::688072"
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        "title": "Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology", 
        "acronym": "IONS4SET", 
        "program": "H2020", 
        "funder": {
          "doi": "10.13039/501100000780", 
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    "title": "HIM and AFM Data set from first AFM in the HIM test", 
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    "creators": [
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        "affiliation": "Helmholtz-Zentrum Dresden - Rossendorf", 
        "name": "Hlawacek, Gregor", 
        "orcid": "0000-0001-7192-716X"
      }, 
      {
        "affiliation": "EPFL", 
        "name": "Andany, Santiago", 
        "orcid": "0000-0003-2281-7612"
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    "keywords": [
      "Helium Ion Microscopy", 
      "Atomic Force Microscopy"
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    "description": "<p>In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br>\n(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br>\nnanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br>\nversatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br>\nunprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br>\nperformed without contamination of the sample as well as avoiding environmental changes between<br>\nprocessing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br>\nthe AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br>\nway---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br>\ncharacterisation of the sample after focused ion beam materials modification with the HIM. The<br>\nexperimental setup is described and evaluated through a series of correlative experiments, demonstrating<br>\nthe feasibility of the integration.</p>", 
    "contributors": [
      {
        "name": "Stefan Hummel", 
        "affiliation": "GETec", 
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        "name": "Georg Fantner", 
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