February 4, 2020 Dataset Closed Access

Hlawacek, Gregor; Andany, Santiago

JSON Export

{
  "links": {
    "badge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.250.svg", 
    "doi": "https://doi.org/10.14278/rodare.250", 
    "conceptbadge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.249.svg", 
    "conceptdoi": "https://doi.org/10.14278/rodare.249", 
    "html": "https://rodare.hzdr.de/record/250", 
    "latest": "https://rodare.hzdr.de/api/records/250", 
    "latest_html": "https://rodare.hzdr.de/record/250"
  }, 
  "metadata": {
    "communities": [
      {
        "id": "ecfunded"
      }, 
      {
        "id": "fwi"
      }, 
      {
        "id": "ibc"
      }, 
      {
        "id": "rodare"
      }
    ], 
    "related_identifiers": [
      {
        "scheme": "url", 
        "identifier": "https://www.hzdr.de/publications/Publ-30718", 
        "relation": "isIdenticalTo"
      }, 
      {
        "scheme": "url", 
        "identifier": "https://www.hzdr.de/publications/Publ-30689", 
        "relation": "isReferencedBy"
      }, 
      {
        "scheme": "doi", 
        "identifier": "10.14278/rodare.249", 
        "relation": "isVersionOf"
      }
    ], 
    "grants": [
      {
        "title": "Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology", 
        "links": {
          "self": "https://rodare.hzdr.de/api/grants/10.13039/501100000780::688072"
        }, 
        "code": "688072", 
        "program": "H2020", 
        "funder": {
          "name": "European Commission", 
          "acronyms": [
            "EC"
          ], 
          "links": {
            "self": "https://rodare.hzdr.de/api/funders/10.13039/501100000780"
          }, 
          "doi": "10.13039/501100000780"
        }, 
        "acronym": "IONS4SET"
      }
    ], 
    "relations": {
      "version": [
        {
          "count": 1, 
          "last_child": {
            "pid_type": "recid", 
            "pid_value": "250"
          }, 
          "is_last": true, 
          "parent": {
            "pid_type": "recid", 
            "pid_value": "249"
          }, 
          "index": 0
        }
      ]
    }, 
    "resource_type": {
      "type": "dataset", 
      "title": "Dataset"
    }, 
    "access_right": "closed", 
    "creators": [
      {
        "affiliation": "Helmholtz-Zentrum Dresden - Rossendorf", 
        "name": "Hlawacek, Gregor", 
        "orcid": "0000-0001-7192-716X"
      }, 
      {
        "affiliation": "EPFL", 
        "name": "Andany, Santiago", 
        "orcid": "0000-0003-2281-7612"
      }
    ], 
    "keywords": [
      "Helium Ion Microscopy", 
      "Atomic Force Microscopy"
    ], 
    "contributors": [
      {
        "type": "ProjectMember", 
        "affiliation": "GETec", 
        "name": "Hummel, Stefan"
      }, 
      {
        "type": "ProjectLeader", 
        "affiliation": "EPFL", 
        "name": "Fantner, Georg"
      }
    ], 
    "description": "<p>In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br>\n(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br>\nnanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br>\nversatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br>\nunprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br>\nperformed without contamination of the sample as well as avoiding environmental changes between<br>\nprocessing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br>\nthe AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br>\nway---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br>\ncharacterisation of the sample after focused ion beam materials modification with the HIM. The<br>\nexperimental setup is described and evaluated through a series of correlative experiments, demonstrating<br>\nthe feasibility of the integration.</p>", 
    "doi": "10.14278/rodare.250", 
    "access_right_category": "danger", 
    "publication_date": "2020-02-04", 
    "title": "HIM and AFM Data set from first AFM in the HIM test", 
    "doc_id": "1", 
    "pub_id": "30718"
  }, 
  "doi": "10.14278/rodare.250", 
  "conceptrecid": "249", 
  "owners": [
    162
  ], 
  "revision": 10, 
  "updated": "2024-08-13T12:23:06.614618+00:00", 
  "stats": {
    "volume": 343415088.0, 
    "unique_downloads": 2.0, 
    "version_unique_downloads": 2.0, 
    "unique_views": 488.0, 
    "downloads": 2.0, 
    "version_unique_views": 488.0, 
    "version_views": 760.0, 
    "version_downloads": 2.0, 
    "version_volume": 343415088.0, 
    "views": 760.0
  }, 
  "created": "2020-02-04T14:14:26.186361+00:00", 
  "conceptdoi": "10.14278/rodare.249", 
  "id": 250
}