Dataset Open Access

Data to Impact on various cleaning procedures on p-GaN surfaces

Schaber, Jana; Xiang, Rong; Arnold, André; Ryzhov, Anton; Teichert, Jochen; Murcek, Petr; Zwartek, Paul; Ma, Shuai; Michel, Peter

This folder "XPS data" contains original and evaluated XPS data (.vms) on a p-GaN sample which was treated at various temperatures and underwent Ar+ irradiation.

Furthermore, the folder "REM Images" contains REM images (.tif) and EDX data (.xlsx) on the used excessively treated sample.

All images that are published in the main manuscript are collected as .tif files in the folder "images".

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Dataset on Impact of various cleaning procedures on p-GaN
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