Dataset Open Access

Data to Impact on various cleaning procedures on p-GaN surfaces

Schaber, Jana; Xiang, Rong; Arnold, André; Ryzhov, Anton; Teichert, Jochen; Murcek, Petr; Zwartek, Paul; Ma, Shuai; Michel, Peter


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        <foaf:name>Ma, Shuai</foaf:name>
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        <foaf:name>Michel, Peter</foaf:name>
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    <dct:title>Data to Impact on various cleaning procedures on p-GaN surfaces</dct:title>
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    <dcat:keyword>damage effects</dcat:keyword>
    <dcat:keyword>sputtering damage</dcat:keyword>
    <dcat:keyword>surface cleaning</dcat:keyword>
    <dcat:keyword>p-GaN</dcat:keyword>
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    <dct:description>&lt;p&gt;This folder &amp;quot;XPS data&amp;quot; contains original and evaluated XPS data (.vms) on a p-GaN sample which was treated at various temperatures and underwent Ar+ irradiation.&lt;/p&gt; &lt;p&gt;Furthermore, the folder &amp;quot;REM Images&amp;quot; contains REM images (.tif) and EDX data (.xlsx) on the used excessively treated sample.&lt;/p&gt; &lt;p&gt;All images that are published in the main manuscript are collected as .tif files in the folder &amp;quot;images&amp;quot;.&lt;/p&gt;</dct:description>
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