Dataset on Impact of various cleaning procedures on p-GaN surfaces.zip
Dataset on Impact of various cleaning procedures on p-GaN surfaces
REM Images
EDX_comparison_evaluation.xlsx
306.8 kB
sputteredGaN_middle07.tif
793.0 kB
sputteredGaN_middle37.tif
793.0 kB
XPS data
Fig.1_comparison of wet chemical cleaning.vms
34.9 kB
Fig.2_wet chemical cleaning comparison.vms
28.7 kB
Fig.3_thermal_cleaning.vms
74.8 kB
Fig.4_thermal cleaning_quantification.vms
30.1 kB
Fig.5_sputtering.vms
20.3 kB
Fig.6_sputtering_quantification.vms
29.2 kB
for Fig. 3
0_320C.vms
11.8 kB
1_500C.vms
12.1 kB
2_570C.vms
12.3 kB
3_610C_40min.vms
12.7 kB
4_625C_90min.vms
13.1 kB
5_650C_40min.vms
12.9 kB
for Fig. 5
5_650C_40min.vms
12.9 kB
6_after 1.5kV sputtering.vms
6.3 kB
images
Figure 1.tif
2.1 MB
Figure 2.tif
994.7 kB
Figure 3.png
602.1 kB
Figure 4.tif
815.0 kB
Figure 5.png
267.1 kB
Figure 6.tif
771.0 kB
Figure 7.tif
2.8 MB