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Dataset on Impact of various cleaning procedures on p-GaN surfaces.zip

Dataset on Impact of various cleaning procedures on p-GaN surfaces
- REM Images
  - EDX_comparison_evaluation.xlsx 306.8 kB
  - sputteredGaN_middle07.tif 793.0 kB
  - sputteredGaN_middle37.tif 793.0 kB
- XPS data
  - Fig.1_comparison of wet chemical cleaning.vms 34.9 kB
  - Fig.2_wet chemical cleaning comparison.vms 28.7 kB
  - Fig.3_thermal_cleaning.vms 74.8 kB
  - Fig.4_thermal cleaning_quantification.vms 30.1 kB
  - Fig.5_sputtering.vms 20.3 kB
  - Fig.6_sputtering_quantification.vms 29.2 kB
  - for Fig. 3
    - 0_320C.vms 11.8 kB
    - 1_500C.vms 12.1 kB
    - 2_570C.vms 12.3 kB
    - 3_610C_40min.vms 12.7 kB
    - 4_625C_90min.vms 13.1 kB
    - 5_650C_40min.vms 12.9 kB
  - for Fig. 5
    - 5_650C_40min.vms 12.9 kB
    - 6_after 1.5kV sputtering.vms 6.3 kB
- images
  - Figure 1.tif 2.1 MB
  - Figure 2.tif 994.7 kB
  - Figure 3.png 602.1 kB
  - Figure 4.tif 815.0 kB
  - Figure 5.png 267.1 kB
  - Figure 6.tif 771.0 kB
  - Figure 7.tif 2.8 MB