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Data publication: Controlled Silicidation of SiNW using FLA

Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan


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{
  "@type": "ImageObject", 
  "name": "Data publication: Controlled Silicidation of SiNW using FLA", 
  "sameAs": [
    "https://www.hzdr.de/publications/Publ-33452"
  ], 
  "identifier": "https://doi.org/10.14278/rodare.1270", 
  "creator": [
    {
      "@type": "Person", 
      "name": "Khan, Muhammad Bilal", 
      "@id": "https://orcid.org/0000-0003-4627-9433"
    }, 
    {
      "@type": "Person", 
      "name": "Prucnal, Slawomir", 
      "@id": "https://orcid.org/0000-0002-4088-6032"
    }, 
    {
      "@type": "Person", 
      "name": "Ghosh, Sayantan"
    }, 
    {
      "@type": "Person", 
      "name": "Deb, Dipjyoti"
    }, 
    {
      "@type": "Person", 
      "name": "H\u00fcbner, Ren\u00e9", 
      "@id": "https://orcid.org/0000-0002-5200-6928"
    }, 
    {
      "@type": "Person", 
      "name": "Pohl, Darius", 
      "affiliation": "Dresden Center for Nanoanalysis (DCN), CfAED, TU Dresden"
    }, 
    {
      "@type": "Person", 
      "name": "Rebohle, Lars", 
      "@id": "https://orcid.org/0000-0002-8066-6392"
    }, 
    {
      "@type": "Person", 
      "name": "Mikolajick, Thomas", 
      "affiliation": "Namlab gGmbH, N\u00f6thnitzer Strasse 64, Dresden, 01187, Germany"
    }, 
    {
      "@type": "Person", 
      "name": "Erbe, Artur", 
      "@id": "https://orcid.org/0000-0001-6368-8728"
    }, 
    {
      "@type": "Person", 
      "name": "Georgiev, Yordan", 
      "@id": "https://orcid.org/0000-0002-3146-8031"
    }
  ], 
  "url": "https://rodare.hzdr.de/record/1270", 
  "keywords": [], 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "datePublished": "2021-11-23", 
  "@id": "https://doi.org/10.14278/rodare.1270", 
  "description": "<p>The folder contains the following:&nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</p>", 
  "@context": "https://schema.org/"
}
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