November 23, 2021 Figure Open Access

Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan

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{
  "description": "<p>The folder contains the following:&nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</p>", 
  "identifier": "https://doi.org/10.14278/rodare.1270", 
  "datePublished": "2021-11-23", 
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      "affiliation": "Dresden Center for Nanoanalysis (DCN), CfAED, TU Dresden"
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      "name": "Rebohle, Lars", 
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      "name": "Mikolajick, Thomas", 
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      "name": "Erbe, Artur", 
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  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "sameAs": [
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  "name": "Data publication: Controlled Silicidation of SiNW using FLA", 
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