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Data publication: Controlled Silicidation of SiNW using FLA

Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan


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  <dc:creator>Khan, Muhammad Bilal</dc:creator>
  <dc:creator>Prucnal, Slawomir</dc:creator>
  <dc:creator>Ghosh, Sayantan</dc:creator>
  <dc:creator>Deb, Dipjyoti</dc:creator>
  <dc:creator>Hübner, René</dc:creator>
  <dc:creator>Pohl, Darius</dc:creator>
  <dc:creator>Rebohle, Lars</dc:creator>
  <dc:creator>Mikolajick, Thomas</dc:creator>
  <dc:creator>Erbe, Artur</dc:creator>
  <dc:creator>Georgiev, Yordan</dc:creator>
  <dc:date>2021-11-23</dc:date>
  <dc:description>The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</dc:description>
  <dc:identifier>https://rodare.hzdr.de/record/1270</dc:identifier>
  <dc:identifier>10.14278/rodare.1270</dc:identifier>
  <dc:identifier>oai:rodare.hzdr.de:1270</dc:identifier>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-33436</dc:relation>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-33452</dc:relation>
  <dc:relation>doi:10.14278/rodare.1269</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/rodare</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:title>Data publication: Controlled Silicidation of SiNW using FLA</dc:title>
  <dc:type>info:eu-repo/semantics/other</dc:type>
  <dc:type>image-figure</dc:type>
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