Figure Open Access
Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan
<?xml version='1.0' encoding='utf-8'?> <oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"> <dc:creator>Khan, Muhammad Bilal</dc:creator> <dc:creator>Prucnal, Slawomir</dc:creator> <dc:creator>Ghosh, Sayantan</dc:creator> <dc:creator>Deb, Dipjyoti</dc:creator> <dc:creator>Hübner, René</dc:creator> <dc:creator>Pohl, Darius</dc:creator> <dc:creator>Rebohle, Lars</dc:creator> <dc:creator>Mikolajick, Thomas</dc:creator> <dc:creator>Erbe, Artur</dc:creator> <dc:creator>Georgiev, Yordan</dc:creator> <dc:date>2021-11-23</dc:date> <dc:description>The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</dc:description> <dc:identifier>https://rodare.hzdr.de/record/1270</dc:identifier> <dc:identifier>10.14278/rodare.1270</dc:identifier> <dc:identifier>oai:rodare.hzdr.de:1270</dc:identifier> <dc:relation>url:https://www.hzdr.de/publications/Publ-33436</dc:relation> <dc:relation>url:https://www.hzdr.de/publications/Publ-33452</dc:relation> <dc:relation>doi:10.14278/rodare.1269</dc:relation> <dc:relation>url:https://rodare.hzdr.de/communities/rodare</dc:relation> <dc:rights>info:eu-repo/semantics/openAccess</dc:rights> <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights> <dc:title>Data publication: Controlled Silicidation of SiNW using FLA</dc:title> <dc:type>info:eu-repo/semantics/other</dc:type> <dc:type>image-figure</dc:type> </oai_dc:dc>
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