Figure Open Access
Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan
<?xml version='1.0' encoding='utf-8'?> <rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:adms="http://www.w3.org/ns/adms#" xmlns:cnt="http://www.w3.org/2011/content#" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dct="http://purl.org/dc/terms/" xmlns:dctype="http://purl.org/dc/dcmitype/" xmlns:dcat="http://www.w3.org/ns/dcat#" xmlns:duv="http://www.w3.org/ns/duv#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:frapo="http://purl.org/cerif/frapo/" xmlns:geo="http://www.w3.org/2003/01/geo/wgs84_pos#" xmlns:gsp="http://www.opengis.net/ont/geosparql#" xmlns:locn="http://www.w3.org/ns/locn#" xmlns:org="http://www.w3.org/ns/org#" xmlns:owl="http://www.w3.org/2002/07/owl#" xmlns:prov="http://www.w3.org/ns/prov#" xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#" xmlns:schema="http://schema.org/" xmlns:skos="http://www.w3.org/2004/02/skos/core#" xmlns:vcard="http://www.w3.org/2006/vcard/ns#" xmlns:wdrs="http://www.w3.org/2007/05/powder-s#"> <rdf:Description rdf:about="https://doi.org/10.14278/rodare.1270"> <rdf:type rdf:resource="http://www.w3.org/ns/dcat#Dataset"/> <dct:type rdf:resource="http://purl.org/dc/dcmitype/Image"/> <dct:identifier rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://doi.org/10.14278/rodare.1270</dct:identifier> <foaf:page rdf:resource="https://doi.org/10.14278/rodare.1270"/> <dct:creator> <rdf:Description rdf:about="http://orcid.org/0000-0003-4627-9433"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Khan, Muhammad Bilal</foaf:name> <foaf:givenName>Muhammad Bilal</foaf:givenName> <foaf:familyName>Khan</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description rdf:about="http://orcid.org/0000-0002-4088-6032"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Prucnal, Slawomir</foaf:name> <foaf:givenName>Slawomir</foaf:givenName> <foaf:familyName>Prucnal</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Ghosh, Sayantan</foaf:name> <foaf:givenName>Sayantan</foaf:givenName> <foaf:familyName>Ghosh</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Deb, Dipjyoti</foaf:name> <foaf:givenName>Dipjyoti</foaf:givenName> <foaf:familyName>Deb</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description rdf:about="http://orcid.org/0000-0002-5200-6928"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Hübner, René</foaf:name> <foaf:givenName>René</foaf:givenName> <foaf:familyName>Hübner</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Pohl, Darius</foaf:name> <foaf:givenName>Darius</foaf:givenName> <foaf:familyName>Pohl</foaf:familyName> <org:memberOf> <foaf:Organization> <foaf:name>Dresden Center for Nanoanalysis (DCN), CfAED, TU Dresden</foaf:name> </foaf:Organization> </org:memberOf> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description rdf:about="http://orcid.org/0000-0002-8066-6392"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Rebohle, Lars</foaf:name> <foaf:givenName>Lars</foaf:givenName> <foaf:familyName>Rebohle</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Mikolajick, Thomas</foaf:name> <foaf:givenName>Thomas</foaf:givenName> <foaf:familyName>Mikolajick</foaf:familyName> <org:memberOf> <foaf:Organization> <foaf:name>Namlab gGmbH, Nöthnitzer Strasse 64, Dresden, 01187, Germany</foaf:name> </foaf:Organization> </org:memberOf> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description rdf:about="http://orcid.org/0000-0001-6368-8728"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Erbe, Artur</foaf:name> <foaf:givenName>Artur</foaf:givenName> <foaf:familyName>Erbe</foaf:familyName> </rdf:Description> </dct:creator> <dct:creator> <rdf:Description rdf:about="http://orcid.org/0000-0002-3146-8031"> <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/> <foaf:name>Georgiev, Yordan</foaf:name> <foaf:givenName>Yordan</foaf:givenName> <foaf:familyName>Georgiev</foaf:familyName> </rdf:Description> </dct:creator> <dct:title>Data publication: Controlled Silicidation of SiNW using FLA</dct:title> <dct:publisher> <foaf:Agent> <foaf:name>Rodare</foaf:name> </foaf:Agent> </dct:publisher> <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#gYear">2021</dct:issued> <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2021-11-23</dct:issued> <owl:sameAs rdf:resource="https://rodare.hzdr.de/record/1270"/> <adms:identifier> <adms:Identifier> <skos:notation rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://rodare.hzdr.de/record/1270</skos:notation> </adms:Identifier> </adms:identifier> <dct:isReferencedBy rdf:resource="https://www.hzdr.de/publications/Publ-33436"/> <owl:sameAs rdf:resource="https://www.hzdr.de/publications/Publ-33452"/> <dct:isVersionOf rdf:resource="https://doi.org/10.14278/rodare.1269"/> <dct:isPartOf rdf:resource="https://rodare.hzdr.de/communities/rodare"/> <dct:description><p>The folder contains the following:&nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</p></dct:description> <dct:accessRights rdf:resource="http://publications.europa.eu/resource/authority/access-right/PUBLIC"/> <dct:accessRights> <dct:RightsStatement rdf:about="info:eu-repo/semantics/openAccess"> <rdfs:label>Open Access</rdfs:label> </dct:RightsStatement> </dct:accessRights> <dcat:distribution> <dcat:Distribution> <dct:rights> <dct:RightsStatement rdf:about="https://creativecommons.org/licenses/by/4.0/legalcode"> <rdfs:label>Creative Commons Attribution 4.0 International</rdfs:label> </dct:RightsStatement> </dct:rights> <dcat:accessURL rdf:resource="https://doi.org/10.14278/rodare.1270"/> </dcat:Distribution> </dcat:distribution> </rdf:Description> </rdf:RDF>
All versions | This version | |
---|---|---|
Views | 218 | 218 |
Downloads | 6 | 6 |
Data volume | 42.0 MB | 42.0 MB |
Unique views | 155 | 155 |
Unique downloads | 6 | 6 |