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Data publication: Controlled Silicidation of SiNW using FLA

Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan


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{
  "abstract": "<p>The folder contains the following:&nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</p>", 
  "title": "Data publication: Controlled Silicidation of SiNW using FLA", 
  "id": "1270", 
  "author": [
    {
      "family": "Khan, Muhammad Bilal"
    }, 
    {
      "family": "Prucnal, Slawomir"
    }, 
    {
      "family": "Ghosh, Sayantan"
    }, 
    {
      "family": "Deb, Dipjyoti"
    }, 
    {
      "family": "H\u00fcbner, Ren\u00e9"
    }, 
    {
      "family": "Pohl, Darius"
    }, 
    {
      "family": "Rebohle, Lars"
    }, 
    {
      "family": "Mikolajick, Thomas"
    }, 
    {
      "family": "Erbe, Artur"
    }, 
    {
      "family": "Georgiev, Yordan"
    }
  ], 
  "publisher": "Rodare", 
  "issued": {
    "date-parts": [
      [
        2021, 
        11, 
        23
      ]
    ]
  }, 
  "DOI": "10.14278/rodare.1270", 
  "type": "figure"
}
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